CAJ | 학술논문

提出了一种利用软模压印制备微透镜阵列的技术.采用传统的光刻胶热熔方法制备微透镜阵列母板,利用复制模具的方法在聚二甲基硅氧烷(PDMS)上得到一个和母板表面图形相反的模具,最后通过压印的方法把PDMS模具上的图形转移到涂有紫外固化胶的玻璃基片上,待紫外胶完全固化后可得到和母板一致的微透镜阵列.经过测试微透镜阵列的焦点图像和表面形貌可发现最后制备的微透镜阵列表面形貌均匀、聚焦性能良好、光忖强均匀.
제출료일충이용연모압인제비미투경진렬적기술.채용전통적광각효열용방법제비미투경진렬모판,이용복제모구적방법재취이갑기규양완(PDMS)상득도일개화모판표면도형상반적모구,최후통과압인적방법파PDMS모구상적도형전이도도유자외고화효적파리기편상,대자외효완전고화후가득도화모판일치적미투경진렬.경과측시미투경진렬적초점도상화표면형모가발현최후제비적미투경진렬표면형모균균、취초성능량호、광촌강균균.
A method for fabrication of microlens arrays using soft lithography is reported. The master of the microlens array is fabricated by traditional thermal reflow technology. The microlens array is first transferred on an elastomeric mold using replica molding method, and then the elastomeric mold with microlens structure on its surface is imprinted on the glass substrate with ultraviolet (UV) curable polymer on it. After the UV glue was fully solidified, the final microlens array is formed on the UV curable polymer of glass substrate. The microlens array is tested and it is found that it has uniform focusing function. This technology has great potential application for fabrication of polymer microlens array with low cost and high throughput.