电子与封装
電子與封裝
전자여봉장
EIECTRONICS AND PACKAGING
2011年
8期
10-14
,共5页
冯达%李秀林%丁荣峥%王洋%明雪飞
馮達%李秀林%丁榮崢%王洋%明雪飛
풍체%리수림%정영쟁%왕양%명설비
气密封装%内部气氛%氧气含量%二氧化碳含量%氦气含量%水汽含量
氣密封裝%內部氣氛%氧氣含量%二氧化碳含量%氦氣含量%水汽含量
기밀봉장%내부기분%양기함량%이양화탄함량%양기함량%수기함량
hermetic package%internal atmosphere%oxygen contents%carbon dioxide contents%helium contents%moisture
气密性封装技术应用广泛,内部水汽的含量能很好地控制在5 000×10-6以下。但在气密性封装器件的失效分析中发现,失效器件的某些失效与其内部除水汽之外的其他气氛含量异常有关,如锡基焊料焊接芯片长期贮存后抗剪/抗拉强度下降,与内部氧气含量高有关;银玻璃烧结的,长期贮存后抗剪/抗拉强度下降,与内部二氧化碳含量异常相关;内部氦含量高,则往往与返工处置不恰当相关,上述现象表明气密性封装中仅控制水汽含量是不够的。文章分析了腔体内氧气、二氧化碳、氦气的来源,气体含量异常与封装工艺的关系。同时在分析试验的基础上提出了针对性的工艺措施,试验结果表明这些改进措施能够很好地解决封装腔体内氧气、二氧化碳、氦气含量,并取得了期望的结果。
氣密性封裝技術應用廣汎,內部水汽的含量能很好地控製在5 000×10-6以下。但在氣密性封裝器件的失效分析中髮現,失效器件的某些失效與其內部除水汽之外的其他氣氛含量異常有關,如錫基銲料銲接芯片長期貯存後抗剪/抗拉彊度下降,與內部氧氣含量高有關;銀玻璃燒結的,長期貯存後抗剪/抗拉彊度下降,與內部二氧化碳含量異常相關;內部氦含量高,則往往與返工處置不恰噹相關,上述現象錶明氣密性封裝中僅控製水汽含量是不夠的。文章分析瞭腔體內氧氣、二氧化碳、氦氣的來源,氣體含量異常與封裝工藝的關繫。同時在分析試驗的基礎上提齣瞭針對性的工藝措施,試驗結果錶明這些改進措施能夠很好地解決封裝腔體內氧氣、二氧化碳、氦氣含量,併取得瞭期望的結果。
기밀성봉장기술응용엄범,내부수기적함량능흔호지공제재5 000×10-6이하。단재기밀성봉장기건적실효분석중발현,실효기건적모사실효여기내부제수기지외적기타기분함량이상유관,여석기한료한접심편장기저존후항전/항랍강도하강,여내부양기함량고유관;은파리소결적,장기저존후항전/항랍강도하강,여내부이양화탄함량이상상관;내부양함량고,칙왕왕여반공처치불흡당상관,상술현상표명기밀성봉장중부공제수기함량시불구적。문장분석료강체내양기、이양화탄、양기적래원,기체함량이상여봉장공예적관계。동시재분석시험적기출상제출료침대성적공예조시,시험결과표명저사개진조시능구흔호지해결봉장강체내양기、이양화탄、양기함량,병취득료기망적결과。
Hermetic package technology has been widely used in nowadays.There have been a lot of research on the vapor contents in electronic components sealed cavity.Internal vapor contents can be controlled in less than 5？000×10-6.But in the failure analysis about the hermetic package electronic components,we found that some failure about the components associated with other atmosphere contents anomaly in addition to other internal water vapor.For example,soldering alloy,shear strength and tensile strength will be reduced after a long-term storage,associated with the anomaly of internal oxygen contents.Silver glass sinter,shear strength and tensile strength will be reduced after a long-term storage,associated with the anomaly of internal carbon dioxide contents;The growth of the content in internal helium is often associated with inappropriate rework.These above phenomenons show that only controlling vapor contents was not enough for hermetic package.In this article,authors analyzed the relationship between the gas contents in the cavity anomaly with the mass of packaging,and the main reason caused the increase of oxygen,carbon dioxide and helium contents.At the same time,on the foundation of the analytical test,targeted technological measures is proposed.Experiments show that these improvement measures can solve the problem of oxygen,carbon dioxide and helium contents in the cavity smoothly,and obtain desired results.
