CAJ | 학술논문

光谱分色滤光片对成像光谱技术至关重要,是实现光电仪器体积小、质量轻的一个重要器件.根据金属膜具有高反射率的特点和可以进行诱增透的原理,介绍了透0.45 μm～1.6 μm反8 μm～12 μm光谱分色滤光片的膜料选择和膜系设计,并应用JGP560A2型磁控溅射镀膜机制备出了光谱性能和理化性能较好的宽光谱分色滤光片,其光谱性能达到0.45 μm～1.6 μm波段范围内,平均透过率大于80%;8 μm～12 μm波段范围内,平均反射率大于91%.
광보분색려광편대성상광보기술지관중요,시실현광전의기체적소、질량경적일개중요기건.근거금속막구유고반사솔적특점화가이진행유증투적원리,개소료투0.45 μm～1.6 μm반8 μm～12 μm광보분색려광편적막료선택화막계설계,병응용JGP560A2형자공천사도막궤제비출료광보성능화이화성능교호적관광보분색려광편,기광보성능체도0.45 μm～1.6 μm파단범위내,평균투과솔대우80%;8 μm～12 μm파단범위내,평균반사솔대우91%.
Spectrum splitting filter is a key element for imaging spectrum technique. Based on the high reflection feature of the metal film and induced transmission theory, a novel element transmitting in 0.45 μm～1.6 μm and reflecting in 8 μm～12 μm was introduced. The deposition materials and the film design were presented. By using JGP560A2 magnetron-sputter deposited device, the element was produced and its optical characteristics were tested. Its average transmission ratio is more than 80% in 0.45 μm～1.6 μm, and average reflection ratio is more than 91% in 8 μm～12 μm.