电气技术
電氣技術
전기기술
ELECTRICAL ENGINEERING
2011年
10期
32-38
,共7页
类金刚石薄膜%摩擦磨损%盐雾腐蚀%电化学腐蚀%等离子体化学气相沉积
類金剛石薄膜%摩抆磨損%鹽霧腐蝕%電化學腐蝕%等離子體化學氣相沉積
류금강석박막%마찰마손%염무부식%전화학부식%등리자체화학기상침적
DLC films%Wear and friction%Salt-spray corrosion%Electrochemical corrosion%Plasma enhanced chemical vapor deposition
金属材料在实际生活中应用广泛,但其易被摩擦磨损及易被腐蚀的特点成为其广泛应用中的主要障碍。本文介绍利用类金刚石（Diamond-like Carbon,DLC）的高硬度、低摩擦系数、高耐磨性及高化学稳定性等特点,采用等离子体增强化学气相沉积的方法,以C2H2为碳源、Ar为辅助气体在金属表面沉积DLC薄膜来提高金属的耐磨耐腐蚀性能。薄膜和基底的耐腐蚀测试分别用电化学腐蚀和烟雾腐蚀测量,DLC膜的化学结构和组成通过傅里叶红外光谱仪测量,文中讨论了DLC膜结构和组成对其耐腐蚀性能的影响。
金屬材料在實際生活中應用廣汎,但其易被摩抆磨損及易被腐蝕的特點成為其廣汎應用中的主要障礙。本文介紹利用類金剛石（Diamond-like Carbon,DLC）的高硬度、低摩抆繫數、高耐磨性及高化學穩定性等特點,採用等離子體增彊化學氣相沉積的方法,以C2H2為碳源、Ar為輔助氣體在金屬錶麵沉積DLC薄膜來提高金屬的耐磨耐腐蝕性能。薄膜和基底的耐腐蝕測試分彆用電化學腐蝕和煙霧腐蝕測量,DLC膜的化學結構和組成通過傅裏葉紅外光譜儀測量,文中討論瞭DLC膜結構和組成對其耐腐蝕性能的影響。
금속재료재실제생활중응용엄범,단기역피마찰마손급역피부식적특점성위기엄범응용중적주요장애。본문개소이용류금강석（Diamond-like Carbon,DLC）적고경도、저마찰계수、고내마성급고화학은정성등특점,채용등리자체증강화학기상침적적방법,이C2H2위탄원、Ar위보조기체재금속표면침적DLC박막래제고금속적내마내부식성능。박막화기저적내부식측시분별용전화학부식화연무부식측량,DLC막적화학결구화조성통과부리협홍외광보의측량,문중토론료DLC막결구화조성대기내부식성능적영향。
Metal materials are used widely in daily life,however,they are always corroded and fretted easily,which restricts its development.Since Diamond-like Carbon（DLC） has amount of excellent characterization,such as high hardness,low friction coefficient,high chemical stability,thus in this paper,DLC films as the corrosion resistance layer were deposited on metal by capacitively coupled plasma（CCP）-enhanced chemical vapor deposition（RF-PECVD） powered by radio frequency.In here C2H2 as carbon source and Ar as the dilution gas were utilized to improve corrosion resistance.The corrosion resistant test on coatings and substrates were then examined separately by the potentiodynamic polarization measurement and salt-spray corrosion test.The chemical structure and composition of DLC films were analyzed by FTIR and the relationship to anti-corrosion property was discussed.
