CAJ | 학술논문

开发了一种把电弧等离子体冶炼和电磁感应搅拌熔体相联合的在高纯石墨坩埚内冶炼提纯工业硅的硅冶炼提纯技术.掺入到电弧等离子体工作气体流中的反应性气体在硅熔体液面处与杂质反应生成挥发性杂质化合物.工业硅中难去除的杂质是B,P和Al.用由水蒸气构成的反应性气体精炼熔融态工业硅来降低其中B和P的含量,随后定向凝固移除其他杂质.用此方法冶炼处理工业硅,其中的B,P,Al,Fe,Ti,Ca和Cu的含量从7 67,73,1 931,2 845,166,235和56 mg/kg分别降低到5 85,29,202,676,36,89和9 mg/kg.硅的纯度由原来的99 46%提纯高到99 93%.
개발료일충파전호등리자체야련화전자감응교반용체상연합적재고순석묵감과내야련제순공업규적규야련제순기술.참입도전호등리자체공작기체류중적반응성기체재규용체액면처여잡질반응생성휘발성잡질화합물.공업규중난거제적잡질시B,P화Al.용유수증기구성적반응성기체정련용융태공업규래강저기중B화P적함량,수후정향응고이제기타잡질.용차방법야련처리공업규,기중적B,P,Al,Fe,Ti,Ca화Cu적함량종7 67,73,1 931,2 845,166,235화56 mg/kg분별강저도5 85,29,202,676,36,89화9 mg/kg.규적순도유원래적99 46%제순고도99 93%.
An approach combining arc plasma and electromagnetic stirring of molten silicon has been developed to refine metallurgical grade silicon in a high purity graphite crucible. The addition of reactive gases to the arc plasma gas led to volatilization of impurities at the melt silicon surface. The most problematic impurities to remove from metallurgical grade silicon are B, P and Al. A simple process to remove B and P from metallurgical grade silicon by treatment with vapor steam was developed by refining metallurgical grade silicon in the molten state followed by directional solidification. Using commercially available metallurgical grade silicon as a starting material, it was reduced from 7 67 mg/kg to 5 85 mg/kg of B, from 73 mg/kg to 29 mg/kg of P, from 1 931 mg/kg to 202 mg/kg of Al, from 2 845 mg/kg to 676 mg/kg of Fe, from 166 mg/kg to 36 mg/kg of Ti, from 235 mg/kg to 89 mg/kg of Ca, from 56 mg/kg to 9 mg/kg of Cu by utilizing this approach. The purity of silicon refined increased from 99 46% of MG silicon to 99 93%.