CAJ | 학술논문

采用坩埚下降法,生长了直径为5 cm的铌酸锂晶体.探讨了晶体生长工艺条件,测试了晶体的透过光谱.所得晶体呈浅茶色,分析认为主要是氧空位缺陷所致.铌酸锂晶体通常用作声表面波(surface acoustic wave,SAW)器件的基片,氧空位缺陷可增加基片的电导率,减少器件制造过程中晶片开裂,有利于提高SAW器件成品率.
채용감과하강법,생장료직경위5 cm적니산리정체.탐토료정체생장공예조건,측시료정체적투과광보.소득정체정천다색,분석인위주요시양공위결함소치.니산리정체통상용작성표면파(surface acoustic wave,SAW)기건적기편,양공위결함가증가기편적전도솔,감소기건제조과정중정편개렬,유리우제고SAW기건성품솔.
As a surface acoustic wave (SAW) substrate material, LiNbO3 crystal up to 5 cm in diameter was grown by the vertical Bridgman method. The growth parameters were optimized and the optical transmittance spectra of the LiNbO3 crystal were measured.The as-grown crystal shows a pale brown color, which was attributed to oxygen deficiency during the growth process. Oxygen deftciency produced in crystal may increase electric conductivity and reduce cracking of the LiNbO3 substrates, which is helpful to increase the yield of SAW devices.