CAJ | 학술논문

报道了在成功地研制彩色电视机用的高反压大功率晶体管钝化玻璃粉的基础上，摸索了采用电泳涂覆技术以形成一定厚度的高质量熔凝玻璃薄膜的方法，用差热分析 (DTA)技术确定了玻璃粉的软化温度、烧结温度分别为 590 和 680℃。用X射线衍射(XRD) 和光电子能谱(XPS) 对薄膜的物相和组份进行了分析，同时，将熔凝玻璃薄膜做成金属-绝缘体-半导体 (MIS) 结构，对样品进行了 C-V 特性测量，固定电荷密度为 1.4×1010 cm-2，可动离子数为 1.2×1011 cm-2。
보도료재성공지연제채색전시궤용적고반압대공솔정체관둔화파리분적기출상，모색료채용전영도복기술이형성일정후도적고질량용응파리박막적방법，용차열분석 (DTA)기술학정료파리분적연화온도、소결온도분별위 590 화 680℃。용X사선연사(XRD) 화광전자능보(XPS) 대박막적물상화조빈진행료분석，동시，장용응파리박막주성금속-절연체-반도체 (MIS) 결구，대양품진행료 C-V 특성측량，고정전하밀도위 1.4×1010 cm-2，가동리자수위 1.2×1011 cm-2。
Passivation glass powders used in the high-breakdown-voltage and high-power transistors of color TV were obtained. Based on these works, electrophoretic coating method was used to deposit the high quality fused glass films. The softening and sintering temperature of 590℃ and 680℃ of the fused glass powder were obtained by using the different thermal analysis method. The crystal structures and compositions of the glass films were investigated by X-ray diffraction (XRD) and X-ray photoelectron spectrum(XPS) methods. The fused glass films were also used as the insulators in the metal-insulator-semiconductor(MIS) structures. The current-voltage(C-V) characteristics of these MIS structures were measured. The fixed charge density is 1.4×1010 cm-2 and the mobile ion density is 1.2×1011 cm-2.