真空科学与技术学报
真空科學與技術學報
진공과학여기술학보
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY
2001年
2期
83-86,98
,共5页
叶钢锋%严学俭%潘钢%张群%章壮健%华中一
葉鋼鋒%嚴學儉%潘鋼%張群%章壯健%華中一
협강봉%엄학검%반강%장군%장장건%화중일
金属-有机络合物%Ag-TCNQ%纳米晶粒%薄膜%电双稳特性
金屬-有機絡閤物%Ag-TCNQ%納米晶粒%薄膜%電雙穩特性
금속-유궤락합물%Ag-TCNQ%납미정립%박막%전쌍은특성
以物理气相沉积方法将TCNQ和Ag制备的金属有机络合物薄膜,在一定的工艺条件下可做到构成薄膜的晶粒直径为40 nm左右,粗糙度也为纳米量级。同时在大气及室温条件下,在STM电场的作用下薄膜可从高阻态转换为低阻态,作用点的直径约为70 nm。
以物理氣相沉積方法將TCNQ和Ag製備的金屬有機絡閤物薄膜,在一定的工藝條件下可做到構成薄膜的晶粒直徑為40 nm左右,粗糙度也為納米量級。同時在大氣及室溫條件下,在STM電場的作用下薄膜可從高阻態轉換為低阻態,作用點的直徑約為70 nm。
이물리기상침적방법장TCNQ화Ag제비적금속유궤락합물박막,재일정적공예조건하가주도구성박막적정립직경위40 nm좌우,조조도야위납미량급。동시재대기급실온조건하,재STM전장적작용하박막가종고조태전환위저조태,작용점적직경약위70 nm。
Organometallic complex Ag-TCNQ thin film was prepared by physical vapor deposition and low temperature annea-ling.The film was studied with an air scanning tunneling microscopy.The grain sizes of the film was estimated to be less than 40 nm with a roughness of a few nanometers.The electric field of the SPM tip can significantly change the impedance of the film ,from a high impedance state to a low impedance state.The low impedance area involved was evaluated to be 70 nm in diameter.