光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2012年
3期
607-615
,共9页
张飞虎%付鹏强%汪圣飞%张强
張飛虎%付鵬彊%汪聖飛%張彊
장비호%부붕강%왕골비%장강
空气静压轴承%径推一体轴承%承载力%轴承刚度%超精密机床%计算流体力学
空氣靜壓軸承%徑推一體軸承%承載力%軸承剛度%超精密機床%計算流體力學
공기정압축승%경추일체축승%승재력%축승강도%초정밀궤상%계산류체역학
aerostatic bearing%radial-thrust bearing%loading capacity%bearing stiffness%ultra-precision machine tool%computational fluid dynamics
提出了一种新的径推一体式静压主轴支撑方式来优化机床主轴系统性能,以满足超精密飞切机床对气体静压轴承高刚度的要求.采用计算流体力学和有限体积法对气体静压轴承气膜内部的流场与压力场进行仿真,并研究其静态特性.为提高计算精度,完成了轴承宏观尺寸与气膜厚度相差几个数量级时气膜厚度方向2 μm间距的网格划分.仿真结果表明,在偏心状态下由于气膜压力的变化使节流孔气体流速在1~200 m/s内变化,机床所采用径推一体式轴承静态刚度达到3 508 N/μm.研究表明,通过增大轴承的供气压强和减小节流孔的直径可改善轴承的静态性能进而提升机床性能.
提齣瞭一種新的徑推一體式靜壓主軸支撐方式來優化機床主軸繫統性能,以滿足超精密飛切機床對氣體靜壓軸承高剛度的要求.採用計算流體力學和有限體積法對氣體靜壓軸承氣膜內部的流場與壓力場進行倣真,併研究其靜態特性.為提高計算精度,完成瞭軸承宏觀呎吋與氣膜厚度相差幾箇數量級時氣膜厚度方嚮2 μm間距的網格劃分.倣真結果錶明,在偏心狀態下由于氣膜壓力的變化使節流孔氣體流速在1~200 m/s內變化,機床所採用徑推一體式軸承靜態剛度達到3 508 N/μm.研究錶明,通過增大軸承的供氣壓彊和減小節流孔的直徑可改善軸承的靜態性能進而提升機床性能.
제출료일충신적경추일체식정압주축지탱방식래우화궤상주축계통성능,이만족초정밀비절궤상대기체정압축승고강도적요구.채용계산류체역학화유한체적법대기체정압축승기막내부적류장여압력장진행방진,병연구기정태특성.위제고계산정도,완성료축승굉관척촌여기막후도상차궤개수량급시기막후도방향2 μm간거적망격화분.방진결과표명,재편심상태하유우기막압력적변화사절류공기체류속재1~200 m/s내변화,궤상소채용경추일체식축승정태강도체도3 508 N/μm.연구표명,통과증대축승적공기압강화감소절류공적직경가개선축승적정태성능진이제승궤상성능.
A new vertical spindle supporting system was presented to improve the stiffness of an aerostatic bearing and to meet the requirements of machine tools for aerostatic bearings.The Computational Fluid Dynamics (CFD) and Finite Volume Method (FVM) were used for simulating the flow field and pressure field inside the aerostatic bearing and for researching its static characteristics.The grid subdivision in the direction of film thickness was implemented while establishing the grid of the gas film.Finally,a 2 μm/grid on the thrust surfaces and 2.5μm/grid on the radial surfaces along the film thickness direction were achieved.Results indicate that the gas velocities around the orifices are about 200 m/s and 1 m/s when the pressure distribution of the gas film is changed and the loading capacity is achieved 3 508 N/μm.It concludes that the static characteristics of the aerostatic bearing can be improved by increasing supply pressures or decreasing the diameters of orifices.