光电子快报（英文版）
光電子快報（英文版）
광전자쾌보（영문판）
OPTO-ELECTRONICS LETTERS
2007年
2期
119-122
,共4页
An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation(KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160× 160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector.
