CAJ | 학술논문

本文介绍了在多自由度纳米定位中,作为表面编码器测量基准的正弦波栅格的复制方法.该栅格表面的形貌为空间正弦波,即沿x和y方向均为波长100 μm,振幅100 nm的正弦波.这种栅格表面的大小为几十微米至几百微米.在安装了快速刀具伺服机构的金刚石车床上,制成了铝基栅格表面.该加工系统的优点是能够以高精度形成被加工表面,但另一方面,由于是在大面积内形成微观表面,故加工时间较长.为了实现快速制作,进行了基于基表面的复制,栅格表面的复制采取了热模压制法,在高分子薄膜上进行了实验.
본문개소료재다자유도납미정위중,작위표면편마기측량기준적정현파책격적복제방법.해책격표면적형모위공간정현파,즉연x화y방향균위파장100 μm,진폭100 nm적정현파.저충책격표면적대소위궤십미미지궤백미미.재안장료쾌속도구사복궤구적금강석차상상,제성료려기책격표면.해가공계통적우점시능구이고정도형성피가공표면,단령일방면,유우시재대면적내형성미관표면,고가공시간교장.위료실현쾌속제작,진행료기우기표면적복제,책격표면적복제채취료열모압제법,재고분자박막상진행료실험.
This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for nanometrology of multi-axis positions. The profile of the gird surface is a superposition of sinusoidal waves in the x-direction and the y-direction with spatial wavelengths on the order of 100 μm and amplitudes on the order of 100 nm. The area of the surface is on the order of several tens of millimeters to hundreds of millimeters. The aluminum master surfaces were fabricated on a diamond turning machine equipped with a fast tool servo, which has advantages of high accuracy and good surface finish but time-consuming for fabricating micro-structures over a large area. Replication from the master surface was then carried out for fast fabrication. Hot embossing was chosen as the replication method. Experiments of replication on polymer films were conducted.