CAJ | 학술논문

关于MEMS结构疲劳特性的研究报道中,典型的研究疲劳的方法是基于观测裂纹的产生和扩展的,如一种扇型梳壮驱动器用来产生循环的拉压作用,以此可以观察Si梁结构的裂纹的扩展情况.该方法采用渐变参量的方法来描述疲劳现象,如参量平均杨氏模量E,而且提出了一种利用检测电容来达到疲劳特性描述的测试结构.该电容和由于作用力让梁产生的位移之间有关.通过检测到的电容值,计算平均杨氏模量E以此来反映这种简单的MEMS结构的疲劳特性,最后,这种方法通过ANSYS进行验证.
관우MEMS결구피로특성적연구보도중,전형적연구피로적방법시기우관측렬문적산생화확전적,여일충선형소장구동기용래산생순배적랍압작용,이차가이관찰Si량결구적렬문적확전정황.해방법채용점변삼량적방법래묘술피로현상,여삼량평균양씨모량E,이차제출료일충이용검측전용래체도피로특성묘술적측시결구.해전용화유우작용력양량산생적위이지간유관.통과검측도적전용치,계산평균양씨모량E이차래반영저충간단적MEMS결구적피로특성,최후,저충방법통과ANSYS진행험증.
Many results on the fatigue properties of a MEMS structure have been reported, among which the typical approaches were based on and developed from the principles of detecting the flaws and their propagations, such as using a fan shape comb-drivers to yield cyclic compression and tension, and then, to observe the flaw propagation in a Si beam structure. This paper aims at describing the fatigue phenomenon by using the gradually variable parameters i.e., mean E method, and then, proposing a test structure, through measuring capacitance to describe the fatigue property. This capacitance has a close relation to the displacement induced by the force applied on. The mean Young's modulus E is calculated according to the measured capacitance to reflect the fatigue property of the simple MEMS structure. At the end of this article, this method is verified by ANSYS.