CAJ | 학술논문

用磁控溅射法在集成了铂加热电极的Si基膜片型微结构单元上制备了SnO2和SnO2-Ag敏感薄膜。用温度调制方式和锯齿波加热方式研究了薄膜的电学特性，讨论了银催化剂、湿度及氧分压对SnO2电学特性的影响。从温度调制方式下测得的电阻-温度曲线可以区分由热激发过程和由表面反应过程引起的膜电阻变化。这种方法为研究气敏薄膜表面反应过程和气敏响应机理开辟了新的途径。
용자공천사법재집성료박가열전겁적Si기막편형미결구단원상제비료SnO2화SnO2-Ag민감박막。용온도조제방식화거치파가열방식연구료박막적전학특성，토론료은최화제、습도급양분압대SnO2전학특성적영향。종온도조제방식하측득적전조-온도곡선가이구분유열격발과정화유표면반응과정인기적막전조변화。저충방법위연구기민박막표면반응과정화기민향응궤리개벽료신적도경。
SnO2 and SnO2-Ag thin films were prepared by magnetron sputtering on the Si-based membrane substrates embedded with a platinum micro heater.The electrical properties of films were measured in temperature-modulated mode and in simple temperature ramp mode.The results are used to evaluate the effects of Ag addition,environmental humidity and O2 partial pressure on the electrical properties of SnO2 thin films.The variation of film resistance caused by thermally activated processes and by surface chemistry can be separated from the R-T curves measured in temperature-modulated mode.Hence,the analysis of R-T curves in temperature-modulated mode is a new method of studying the effect of surface chemistry on electrical properties and sensing mechanism of the films.