CAJ | 학술논문

该文研究了铜互连线中的多余物缺陷对两根相邻的互连线间信号的串扰,提出了互连线之间的多余物缺陷和互连线之间的互容、互感模型,用于定量的计算缺陷对串扰的影响.提出了把缺陷部分单独看作一段RLC电路模型,通过提出的模型研究了不同互连线参数条件下的信号串扰,主要研究了铜互连线的远端串扰和近端串扰,论文最后提出了一些改进串扰的建议.实验结果证明该文提出的信号串扰模型可用于实际的电路设计中,能够对设计人员设计满足串扰要求的电路提供指导.
해문연구료동호련선중적다여물결함대량근상린적호련선간신호적천우,제출료호련선지간적다여물결함화호련선지간적호용、호감모형,용우정량적계산결함대천우적영향.제출료파결함부분단독간작일단RLC전로모형,통과제출적모형연구료불동호련선삼수조건하적신호천우,주요연구료동호련선적원단천우화근단천우,논문최후제출료일사개진천우적건의.실험결과증명해문제출적신호천우모형가용우실제적전로설계중,능구대설계인원설계만족천우요구적전로제공지도.
This paper studies the signal crosstalk due to redundant object defect of adjacent copper interconnects. The models of coupling capacitance and mutual inductance between redundant defect and interconnects are presented, and it can be used to quantitatively calculate the influence of defect on crosstalk. In the experiment model, defect is regard as a separate section RLC circuit. Signal crosstalk is studied under the conditions that are various parameters of interconnect using the model. The far crosstalk and near crosstalk of the copper interconnects are studied. Finally, some advice improved signal crosstalk is put forward. Experiment results show that the presented model can be used actual circuit design, and can guide designer to design circuit for satisfying crosstalk requirements.