CAJ | 학술논문

采用射频磁控溅射法在室温柔性衬底PET上制备了掺锆氧化锌(ZZO)透明导电薄膜.利用不同方法提高了ZZO薄膜的电阻率而未使其可见光透过率降低.X射线衍射(XRD)和扫描电子显微镜(SEM)表明,ZZO薄膜为六角纤锌矿结构的多晶薄膜.在有机衬底和玻璃衬底上制备ZZO薄膜的择优取向不同,前者为(100)晶面,而后者为(002)晶面.在有ZnO缓冲层的PET衬底上制备的ZZO薄膜电阻率比直接生长在玻璃衬底样品上的小.通过优化参数,在PET衬底上制备出了最小电阻率为1.7×10-3Ω·cm、可见光透过率超过93%的ZZO薄膜.实验表明,镀膜之前在柔性衬底上沉积ZnO缓冲层能有效地提高ZZO薄膜的质量.
채용사빈자공천사법재실온유성츤저PET상제비료참고양화자(ZZO)투명도전박막.이용불동방법제고료ZZO박막적전조솔이미사기가견광투과솔강저.X사선연사(XRD)화소묘전자현미경(SEM)표명,ZZO박막위륙각섬자광결구적다정박막.재유궤츤저화파리츤저상제비ZZO박막적택우취향불동,전자위(100)정면,이후자위(002)정면.재유ZnO완충층적PET츤저상제비적ZZO박막전조솔비직접생장재파리츤저양품상적소.통과우화삼수,재PET츤저상제비출료최소전조솔위1.7×10-3Ω·cm、가견광투과솔초과93%적ZZO박막.실험표명,도막지전재유성츤저상침적ZnO완충층능유효지제고ZZO박막적질량.
Different methods were reported to improve the conductivity of ZnO:Zr(zzo) films deposited on flexible substrates by RF magnetron sputtering at room temperature without degrading the optical transmittance in the visible range.X-ray diffraction(XRD)and scanning electron microscopy(SEM)revealed that all the deposited films are polycrystalline with a hexagonal structure.but the preferred plane of ZZO films deposited on flexible substrates is(100) whereas that deposited on glass substmtes is (002).Under proper conditions,the electrical resisitivity of ZZO films deposited on ZnO-buffered flexible substrates significantly decreased compared with that deposited on bare glass substrates.The films with resistivity as low Experimental results show that depositing ZnO buffer layer on flexible substrates before deposition is an effective method to improve the quality of ZZO films.