CAJ | 학술논문

提出了利用一种特殊设计的LED多光束环状分布照明光源,与显微镜组成超光滑表面元件缺陷检测的光学显微散射成像系统,获取适合于数字图像二值化处理的暗背景上的亮瑕疵图像.利用X、Y,两方向的精密移导系统对表面实施子孔径图像的扫描.在原有的子孔径图像拼接"边缘拓展法"算法的基础上,提出一种基于特征分类的多层次图像拼接算法.该算法分为特征分类和多层次拼接两个部分:通过重叠区域内特征的提取和分类,将所有子孔径图像的重叠区域分为四类;然后针对这四类重叠区域的不同特点,有次序地进行图像拼接,最终得到全景图像.并应用二元光学制作了标准比对板,以获得瑕疵正确的数字化评价依据.实验结果证明:该系统和算法特别适合在被测表面范围较大、具有微米量级分辨率的瑕疵的数字化定量检测和评价.
제출료이용일충특수설계적LED다광속배상분포조명광원,여현미경조성초광활표면원건결함검측적광학현미산사성상계통,획취괄합우수자도상이치화처리적암배경상적량하자도상.이용X、Y,량방향적정밀이도계통대표면실시자공경도상적소묘.재원유적자공경도상병접"변연탁전법"산법적기출상,제출일충기우특정분류적다층차도상병접산법.해산법분위특정분류화다층차병접량개부분:통과중첩구역내특정적제취화분류,장소유자공경도상적중첩구역분위사류;연후침대저사류중첩구역적불동특점,유차서지진행도상병접,최종득도전경도상.병응용이원광학제작료표준비대판,이획득하자정학적수자화평개의거.실험결과증명:해계통화산법특별괄합재피측표면범위교대、구유미미량급분변솔적하자적수자화정량검측화평개.
An optical microscopic scattering imaging system was proposed in this paper.It was combined by ring distribution of multi-beam LED light source and a microscope system.An image ofbright defects in black background was obtained,which was suitable for binary-state processing of digital image.Full aperture measurement could be obtained by X,Y sub-aperture scanning system.A multi-cycle image mosaic algorithm based on both feature classification and the previous"edge-expansion method"was proposed,which would be divided into four typos for overlapping regions of the entire sub-aperture image.Then the multi-cycle mosaic was conducted according to different defect features distribution in the overlapped region.Therefore,A full aperture image could be obtained.A group of standard reticules were fabricated by binary optics.It could be used to calibrate the scale of the defects.Experimental results show that the system and the mosaic algorithm for images of defects are suitable for detection and evaluation of the large aperture fine surface.