计量学报
計量學報
계량학보
ACTA METROLOGICA SINICA
2009年
z1期
42-46
,共5页
孙双花%薛梓%叶孝佑%高宏堂
孫雙花%薛梓%葉孝祐%高宏堂
손쌍화%설재%협효우%고굉당
计量学%激光二坐标测量装置%显微视觉%二维线纹标准器%方向链码%线间距
計量學%激光二坐標測量裝置%顯微視覺%二維線紋標準器%方嚮鏈碼%線間距
계량학%격광이좌표측량장치%현미시각%이유선문표준기%방향련마%선간거
Metrology%Laser two-coordinate measurement device%Micro vision%2-D line scale standard%Directional chain code%Line distance
为满足二维线纹标准器高精度检测需求,研究了激光二坐标测量装置的显微视觉系统关键技术.分析了激光二坐标测最装置的工作原理和显微视觉硬件系统的构成,提出了一种基于方向链码的边缘特征点跟踪提取算法,实现了图像边缘快速精确提取,建立了两坐标系间的修正模型,提高了测量精度.实验验证二维线纹标准器线间距和线宽测量重复性的2倍标准差小于10 nm.
為滿足二維線紋標準器高精度檢測需求,研究瞭激光二坐標測量裝置的顯微視覺繫統關鍵技術.分析瞭激光二坐標測最裝置的工作原理和顯微視覺硬件繫統的構成,提齣瞭一種基于方嚮鏈碼的邊緣特徵點跟蹤提取算法,實現瞭圖像邊緣快速精確提取,建立瞭兩坐標繫間的脩正模型,提高瞭測量精度.實驗驗證二維線紋標準器線間距和線寬測量重複性的2倍標準差小于10 nm.
위만족이유선문표준기고정도검측수구,연구료격광이좌표측량장치적현미시각계통관건기술.분석료격광이좌표측최장치적공작원리화현미시각경건계통적구성,제출료일충기우방향련마적변연특정점근종제취산법,실현료도상변연쾌속정학제취,건립료량좌표계간적수정모형,제고료측량정도.실험험증이유선문표준기선간거화선관측량중복성적2배표준차소우10 nm.
The key technology of Micro-vision system in laser two-coordinate measurement device is studied to meet the needs of the high precision measurement of two-dimensional (2-D) line scale standard. The operation principle of laser two-coordinate measurement device and the hardware structure of micro-vision system are analyzed. A feature point tracking and detecting algorithm based on directional chain code is put forward to detecting image edges quickly and accurately. A rectification model of two coordinates is made to improve the accuracy of measurement. Experimental results reveal that the twice standard deviation of measurement repeatability of the line distance and line width 2-D line scale standard is less than 10nm.
