CAJ | 학술논문

本文介绍一种弯曲光纤针尖及其法向力压电探测的新技术.与目前普遍采用的方法不同，弯曲针尖的制作是先利用电阻丝加热，将光纤弯曲成所需的角度，然后再在缓冲氢氟酸中腐蚀成针尖，得到曲率半径为300μm，弯曲角度为120°，长度为500μm的弯曲针尖.同激光或电弧熔拉、弯曲的方法相比，这种方法工艺简单，成本低廉.由弯曲针尖与蜂鸣器压电片组成的悬臂，利用压电片的正、逆压电效应实现弯曲针尖法向力的非光学法探测.实验表明，这种弯尖法向力的探测较直尖切变力具有更高灵敏度，探测距离提高了一倍以上，给实际应用带来很大的便利.
본문개소일충만곡광섬침첨급기법향력압전탐측적신기술.여목전보편채용적방법불동，만곡침첨적제작시선이용전조사가열，장광섬만곡성소수적각도，연후재재완충경불산중부식성침첨，득도곡솔반경위300μm，만곡각도위120°，장도위500μm적만곡침첨.동격광혹전호용랍、만곡적방법상비，저충방법공예간단，성본저렴.유만곡침첨여봉명기압전편조성적현비，이용압전편적정、역압전효응실현만곡침첨법향력적비광학법탐측.실험표명，저충만첨법향력적탐측교직첨절변력구유경고령민도，탐측거리제고료일배이상，급실제응용대래흔대적편리.
A simple,compact technique for a bent fiber tip and its normalforce detection based on piezoelectric effect will be introduced.To fabricate a bent fiber tip,a fiber is first heated to ～1000℃ by a resistant wire and bent to a desired angle.Then,the bent fiber is etched in the buffered hydrofluoric acid.Compared to the conventional laser or spark discharge heating,the fabrication is easier to control and the cost is almost negligible.A bent tip at a bend angle of 120°,with a radius of 300μm and in length of 500μm is achieved.The bent tip is glued to a buzzer slice whose electrode is divided into two parts as a cantilever and its normal force is detected by piezoelectric effect.The resonant frequency of bent tip is 5.79kHz and Q factor 32.Experimental result shows that control distance is more than 40nm,the double in the case of shear-force detection.It is superior to straight fiber tip and its shear force detection.