CAJ | 학술논문

利用Nd:YAG脉冲激光烧蚀Cu靶,实验研究了空气中激光等离子体电学效应在金属探针上产生的电信号的形成机制与演变规律,对探针与烧蚀点之间的距离对电信号的影响进行了测试.结果表明:信号结构与探测距离密切相关,探针距离较近时(<3 mm),信号具有正负双极分布结构,距离较远时(>3 mm),则仅表现为负脉冲单峰结构,且信号幅值与探针距离之间满足I_a∝ d~(-2).对该信号进行详细分析后得出:从等离子体区域出射的高速电子和离子到达探针是信号形成的主要机制,并对信号幅值随探针距离的变化关系进行了合理解释.
이용Nd:YAG맥충격광소식Cu파,실험연구료공기중격광등리자체전학효응재금속탐침상산생적전신호적형성궤제여연변규률,대탐침여소식점지간적거리대전신호적영향진행료측시.결과표명:신호결구여탐측거리밀절상관,탐침거리교근시(<3 mm),신호구유정부쌍겁분포결구,거리교원시(>3 mm),칙부표현위부맥충단봉결구,차신호폭치여탐침거리지간만족I_a∝ d~(-2).대해신호진행상세분석후득출:종등리자체구역출사적고속전자화리자도체탐침시신호형성적주요궤제,병대신호폭치수탐침거리적변화관계진행료합리해석.
The form mechanism and evolution role of electrical signal induced by the laser plasma effect were investigated with a tiny metal probe during Nd: YAG high-power pulse laser ablation on copper in air. And the effect of distance from probe to ablaten point on the electrical signal was tested through experiment. The experimental results show that the signal distribution is closely dependent on the detection distance. The distribution of signal wave is positive-negative double peak in close detection distance (<3 mm), and is negative single peak at long distance (>3 mm). In addition, the peak value of the signal can be gained from the probe distance as follows: I_a ∝d~(-2) . It is considered that the electrical signal is formed of high-speed electrons and ions arriving to probe from laser plasma after analyzing the signal. And the variety relation between peak value of signal and probe distance is explained reasonably.