半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2008年
1期
55-62
,共8页
张云%左玉华%郭剑川%丁武昌%成步文%余金中%王启明
張雲%左玉華%郭劍川%丁武昌%成步文%餘金中%王啟明
장운%좌옥화%곽검천%정무창%성보문%여금중%왕계명
稀释波导%束传播方法%光纤-波导%波导型探测器
稀釋波導%束傳播方法%光纖-波導%波導型探測器
희석파도%속전파방법%광섬-파도%파도형탐측기
diluted waveguide%BPM%fiber-to-waveguide%waveguide photodiode
研究了一种用于边入射型探测器的InP基高效光纤-波导耦合器.它由10个周期的未掺杂120nm InP/80nm InGaAsP(1.05μm带隙)多层膜组成的稀释波导构成.采用半矢量三维束传播(BPM)方法以及中心差分格式,模拟了不同条件下的光纤-波导耦合效率,从而得到了最优耦合条件.对于TE偏振和TM偏振模,计算所得到的最高耦合效率分别为94%和92%.同时,计算表明,此类基于稀释波导的光纤-波导耦合器具有高偏振不敏感性,偏振敏感度低于0.1dB.
研究瞭一種用于邊入射型探測器的InP基高效光纖-波導耦閤器.它由10箇週期的未摻雜120nm InP/80nm InGaAsP(1.05μm帶隙)多層膜組成的稀釋波導構成.採用半矢量三維束傳播(BPM)方法以及中心差分格式,模擬瞭不同條件下的光纖-波導耦閤效率,從而得到瞭最優耦閤條件.對于TE偏振和TM偏振模,計算所得到的最高耦閤效率分彆為94%和92%.同時,計算錶明,此類基于稀釋波導的光纖-波導耦閤器具有高偏振不敏感性,偏振敏感度低于0.1dB.
연구료일충용우변입사형탐측기적InP기고효광섬-파도우합기.타유10개주기적미참잡120nm InP/80nm InGaAsP(1.05μm대극)다층막조성적희석파도구성.채용반시량삼유속전파(BPM)방법이급중심차분격식,모의료불동조건하적광섬-파도우합효솔,종이득도료최우우합조건.대우TE편진화TM편진모,계산소득도적최고우합효솔분별위94%화92%.동시,계산표명,차류기우희석파도적광섬-파도우합기구유고편진불민감성,편진민감도저우0.1dB.
We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration in low cost modules. The fiber-to-waveguide coupler is based on a diluted waveguide,which is composed of ten periods of undoped 120nm InP/80nm InGaAsP (1.05μm bandgap) multiple layers. Using the semi-vectorial three dimensional beam propagation method (BPM) with the central difference scheme, the coupling efficiency of fiber-to-waveguide under different conditions is simulated and studied,and the optimized conditions for fiber-to-waveguide coupling are obtained. For TE-like and TM-like modes, the calculated maximum coupling efficiency is higher than 94% and 92%, respectively. The calculated polarization dependence is less than 0.1dB,showing good polarization independence.