1.55-μm Si-based MOEMS optical tunable filter
  • 万方数据
    中国光学快报(英文版) 중국광학쾌보(영문판)
    CHINESE JOURNAL OF LASERS
    2003年 9期 529-531 ,共3页

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    좌옥화%황창준%성보문%채효%모용위%리전파%라려평%고준화%백운하%강뢰%마조화%주가렴%왕량신%여금중%왕계명





    A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.
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