硅酸盐学报
硅痠鹽學報
규산염학보
JOURNAL OF THE CHINESE CERAMIC SOCIETY
2007年
5期
606-610
,共5页
张天播%赵高凌%郑鹏飞%徐刚%汪建勋%翁文剑%韩高荣
張天播%趙高凌%鄭鵬飛%徐剛%汪建勛%翁文劍%韓高榮
장천파%조고릉%정붕비%서강%왕건훈%옹문검%한고영
氮化钛%常压化学气相沉积%喷涂距离
氮化鈦%常壓化學氣相沉積%噴塗距離
담화태%상압화학기상침적%분도거리
titanium nitride%atmospheric pressure chemical vapor deposition%spraying distance
以TiCl4和NH3为原料,用常压化学气相沉积法在玻璃基板表面沉积得到了TiN薄膜.采用X射线衍射、场发射扫描电子显微镜、电阻仪、紫外-可见光谱仪等研究了喷涂距离(输入TiCl4管道末端到基板之间的距离)对沉积的TiN薄膜的结晶性能和表面形貌,以及薄膜的电学性能和光学性能的影响.结果表明:当喷涂距离为5cm和10cm时,玻璃基板表面形成电阻较高、反射率较低的较疏松薄膜.当喷涂距离增加到13cm和15cm时,可以得到结晶良好、低电阻、高反射、致密的TiN薄膜.当喷涂距离进一步增加到20cm以上,得到的薄膜的电阻率随之升高而反射率下降.对喷涂距离对薄膜性能的影响机理进行了分析,认为喷涂距离的变化会影响扩散到达并吸附在基板表面的反应物分子数量比例,进而影响沉积薄膜的性能.
以TiCl4和NH3為原料,用常壓化學氣相沉積法在玻璃基闆錶麵沉積得到瞭TiN薄膜.採用X射線衍射、場髮射掃描電子顯微鏡、電阻儀、紫外-可見光譜儀等研究瞭噴塗距離(輸入TiCl4管道末耑到基闆之間的距離)對沉積的TiN薄膜的結晶性能和錶麵形貌,以及薄膜的電學性能和光學性能的影響.結果錶明:噹噴塗距離為5cm和10cm時,玻璃基闆錶麵形成電阻較高、反射率較低的較疏鬆薄膜.噹噴塗距離增加到13cm和15cm時,可以得到結晶良好、低電阻、高反射、緻密的TiN薄膜.噹噴塗距離進一步增加到20cm以上,得到的薄膜的電阻率隨之升高而反射率下降.對噴塗距離對薄膜性能的影響機理進行瞭分析,認為噴塗距離的變化會影響擴散到達併吸附在基闆錶麵的反應物分子數量比例,進而影響沉積薄膜的性能.
이TiCl4화NH3위원료,용상압화학기상침적법재파리기판표면침적득도료TiN박막.채용X사선연사、장발사소묘전자현미경、전조의、자외-가견광보의등연구료분도거리(수입TiCl4관도말단도기판지간적거리)대침적적TiN박막적결정성능화표면형모,이급박막적전학성능화광학성능적영향.결과표명:당분도거리위5cm화10cm시,파리기판표면형성전조교고、반사솔교저적교소송박막.당분도거리증가도13cm화15cm시,가이득도결정량호、저전조、고반사、치밀적TiN박막.당분도거리진일보증가도20cm이상,득도적박막적전조솔수지승고이반사솔하강.대분도거리대박막성능적영향궤리진행료분석,인위분도거리적변화회영향확산도체병흡부재기판표면적반응물분자수량비례,진이영향침적박막적성능.
Titanium nitride (TiN) films were prepared by the atmospheric pressure chemical vapor deposition process using titanium tetrachloride and ammonia as reactive gases. The effect of the spraying distance on the crystallization, surface morphology, electrical and optical properties of the films was investigated by X-ray diffraction, field emission scanning electron microscope, resistance tester and ultraviolet-visible spectrometer. It is found that when the spraying distance was 5 cm and 10 cm, only a loose titanium nitride film with high electrical resistance and low reflectance was obtained. When the spurt distance was 13 cm and 15 cm, the films prepared become denser, the electrical resistance is lower, and the reflectance increases. With the increase of the spraying distance over 20 cm,the electrical resistance of the films increases, and its reflectance decreases. The mechanism of the effect of spraying distance on the properties of the films was investigated. The change of spraying distance can affect the proportion of the molecules diffused and adsorbed on the substrate, which then affects the properties of deposited films.
