CAJ | 학술논문

考虑双线振动双质量硅微陀螺仪环境适应性强且两个质量块的差动输出能够有效消除共模干扰的影响,提出了一种新型双质量陀螺仪.依据双质量硅微陀螺的结构和工作原理,对该陀螺的驱动模态进行了理论分析,并提出了简化的动力学方程.利用ANSYS有限元软件对陀螺的驱动模态进行了数值仿真,并对陀螺仪样品进行了电路测试.通过几种不同的加载方式,分别得到了相应的仿真和测试的幅频曲线,结果表明,仿真和实验结果与理论分析完全一致,且双边驱动方式要优于单边驱动方式,反向驱动方式可以使陀螺仪在工作模态运动.仿真和实验结果验证了双质量硅微陀螺的驱动模态特性.
고필쌍선진동쌍질량규미타라의배경괄응성강차량개질량괴적차동수출능구유효소제공모간우적영향,제출료일충신형쌍질량타라의.의거쌍질량규미타라적결구화공작원리,대해타라적구동모태진행료이론분석,병제출료간화적동역학방정.이용ANSYS유한원연건대타라적구동모태진행료수치방진,병대타라의양품진행료전로측시.통과궤충불동적가재방식,분별득도료상응적방진화측시적폭빈곡선,결과표명,방진화실험결과여이론분석완전일치,차쌍변구동방식요우우단변구동방식,반향구동방식가이사타라의재공작모태운동.방진화실험결과험증료쌍질량규미타라적구동모태특성.
A new dual-mass gyro is studied in this paper,for double-linear vibrational dual-mass MEMS gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference.On the basis of the structure and the principle of operation, the driving modal of the dual-mass gyro is analyzed in theory, and the simplified dynamic equations are proposed. Then, the finite element software ANSYS is used tonumerically simulate the driving modal,and a driving circuit is used to test the driving modal of a fabricated gyro sample. By using several loading methods in simulations and tests, the amplitude-frequency curves are obtained. These results are inagreement with the theory analysis,which shows that dual-side driving method is better than single-side driving one,and theopposite-direction driving method can drive a dual-mass gyro in working mode. Simulation and experiment results verify the driving-mode characteristics of this dual-mass micro-gyro.