CAJ | 학술논문

针对非制冷微悬臂梁电容式红外探测器,设计了一款焦平面读出电路.根据电路噪声建模与分析,对电路进行了优化设计以抑制噪声.采用0.35μm 的CMOS工艺设计,制造了16×16读出电路原型.测试结果表明,5V电源电压、50Hz帧频下电路总功耗为16.5mW,典型工作模式下线性度为99.2%,通道一致性大于97%,等效输入噪声电荷小于150e.
침대비제랭미현비량전용식홍외탐측기,설계료일관초평면독출전로.근거전로조성건모여분석,대전로진행료우화설계이억제조성.채용0.35μm 적CMOS공예설계,제조료16×16독출전로원형.측시결과표명,5V전원전압、50Hz정빈하전로총공모위16.5mW,전형공작모식하선성도위99.2%,통도일치성대우97%,등효수입조성전하소우150e.
A readout integrated circuit (ROIC) of focal plane arrays for uncooled infrared detectors based on microcantilever was designed.The ROIC was optimized to reduce noise based on noise modeling and analysis.A prototype of 16×16 ROIC was designed and fabricated by 0.35μm CMOS technology.The measurement results show that the power dissipation is 16.5mW for a 5V supply voltage at 50Hz frame rate,the linearity is 99.2% at typical modes,the uniformity is larger than 97% and the equivalent noise charge (NEC) is below 150e.