CAJ | 학술논문

本文在对高精度光学非球面摆臂式扫描测量方法简要介绍的基础上,建立了高精度接触式扫描测头的结构模型,详细分析了扫描速度对测量精度的影响规律.在此基础上.利用建立的摆臂式扫描测量系统对500mm口径,相对口径1:1的深型球面镜进行了相关测量实验并与干涉测量结果进行了比对.实验验证了上述分析的正确性.
본문재대고정도광학비구면파비식소묘측량방법간요개소적기출상,건립료고정도접촉식소묘측두적결구모형,상세분석료소묘속도대측량정도적영향규률.재차기출상.이용건립적파비식소묘측량계통대500mm구경,상대구경1:1적심형구면경진행료상관측량실험병여간섭측량결과진행료비대.실험험증료상술분석적정학성.
Based on introduction of the swing-arm profilometry,the structural model of the high-accuracy contact scanning probe was built by using the swing-arm profilometer.The effecting rules of the scanning velocity on the measurement accuracy wereanalyzed.A sphere with aperture=500mm,relative aperture=1:1,was tested with the contact scanning probe,and the testing result was compared with that of the interferometer.The experiments validated that the analysis is correct.