CAJ | 학술논문

进行了XeCl激光器工作参数优化实验,通过建立和分析XeCl激光器混合气体的动力学方程及模型,模拟计算了不同工作参数条件下,激光输出的瞬态过程,研究讨论了混合气体的配比和压强对准分子激光器的工作特性的影响,模拟分析了激光器最佳的运行参数.根据模拟结果对XeCl激光器的工作参数进行了优化调整实验,气体浓度配比设置为Ne/Xe/HCl=875/15/1,气体总压强设置为3.6×10~5 Pa,获得了单脉冲能量为180 mJ,脉冲宽度为30 ns的308 nm激光输出,脉冲重复频率为20 Hz,脉冲能量不稳定度小于5%.
진행료XeCl격광기공작삼수우화실험,통과건립화분석XeCl격광기혼합기체적동역학방정급모형,모의계산료불동공작삼수조건하,격광수출적순태과정,연구토론료혼합기체적배비화압강대준분자격광기적공작특성적영향,모의분석료격광기최가적운행삼수.근거모의결과대XeCl격광기적공작삼수진행료우화조정실험,기체농도배비설치위Ne/Xe/HCl=875/15/1,기체총압강설치위3.6×10~5 Pa,획득료단맥충능량위180 mJ,맥충관도위30 ns적308 nm격광수출,맥충중복빈솔위20 Hz,맥충능량불은정도소우5%.
The operating parameters of the XeCl laser was optimized by a series of experiments. The dynamic equations and model of the mixture gas of the XeCl laser in the laser tube were established and analyzed. And then, the numerical simulations of transient state of laser output were carried out under different operating parameters conditions. Furthermore, the influence of the ratio of the hybrid gas constituents and the pressure on the characteristics of laser output was analyzed and discussed. According to the simulation results, the improved experiments were performed in order to get the optimal operating parameters of the XeCl excimer laser. Experimental results show that the optimal laser beam output is obtained when the ratio of gases concentration of Ne, Xe, and HCl is 875:15:1 and the total pressure is 3.6× 10~5 Pa. The laser beam has a single pulse energy of 180 mJ, a pulse width of 30 ns at the wavelength of 308 nm, and its pulse repetition frequency is 20 Hz, the instability of the pulse energy is less than 5%.