中国机械工程
中國機械工程
중국궤계공정
CHINA MECHANICAl ENGINEERING
2012年
5期
599-603
,共5页
董金新%林谢昭%应济%李俊
董金新%林謝昭%應濟%李俊
동금신%림사소%응제%리준
无阀微泵%流固耦合%静电驱动%数值仿真%MEMSCAD
無閥微泵%流固耦閤%靜電驅動%數值倣真%MEMSCAD
무벌미빙%류고우합%정전구동%수치방진%MEMSCAD
valveless micropump%fluid-structure interaction%electrostatic action%numerical simulation%MEMSCAD
采用任意拉格朗日—欧拉(ALE)描述建立了无阀微泵的静电-结构-流体全耦合三维模型,数值仿真表明:泵内流体的动态特性与泵膜的运动存在着密切的关系;扩散/收缩口单元两端的压力差必须达到一定值后才有"整流"泵送效用;泵腔内流体压力的分布几乎一致;流体流动的最大雷诺数远小于宏观条件下认定的临界雷诺数;流体黏滞损失的非线性不容忽视。
採用任意拉格朗日—歐拉(ALE)描述建立瞭無閥微泵的靜電-結構-流體全耦閤三維模型,數值倣真錶明:泵內流體的動態特性與泵膜的運動存在著密切的關繫;擴散/收縮口單元兩耑的壓力差必鬚達到一定值後纔有"整流"泵送效用;泵腔內流體壓力的分佈幾乎一緻;流體流動的最大雷諾數遠小于宏觀條件下認定的臨界雷諾數;流體黏滯損失的非線性不容忽視。
채용임의랍격랑일—구랍(ALE)묘술건립료무벌미빙적정전-결구-류체전우합삼유모형,수치방진표명:빙내류체적동태특성여빙막적운동존재착밀절적관계;확산/수축구단원량단적압력차필수체도일정치후재유"정류"빙송효용;빙강내류체압력적분포궤호일치;류체류동적최대뢰낙수원소우굉관조건하인정적림계뢰낙수;류체점체손실적비선성불용홀시。
A 3-Dimensional accurate analysis of the electrostatic valveless micropump involved in electrostatic dynamics,structural dynamics and fluid dynamics of the system.This was made by using multi-field coupled analysis.The results show that the dynamic characteristics of fluid in the micropump are dependent highly on the vibration of flexible membrane.The flow rectification function of the diffuser/nozzle element will work only after the pressure difference between the two ends of the element reaches a critical value.In the pump chamber,the fluidic press distribution almost independent of the depth variation.The maximum of Reynolds numbers is far less than the traditional critical Reynolds number.Due to the increasing demands for accuracy,the nonlinear features of viscous loss of the fluid can no longer be neglected or simplified,but have to be taken into account in detail.