CAJ | 학술논문

提出一种采用激光直写技术制备微纳阵列的新方法来制备仿壁虎刚毛二级结构微阵列。该制备过程由计算机控制完成。实验制备出具有不同几何尺寸的一级结构阵列，并在此基础上探索制备二级结构微阵列的三种方案，其中，“自上而下”的方案通过对曝光时间和显影时间的控制使第二级结构扎根于第一级结构中，有效提高了两级结构间的连接强度。制备实验的同时，分析了曝光时间、显影时间等参数对阵列制备的影响。激光直写制备微纳阵列的方法具有高效率、低成本的优点。
제출일충채용격광직사기술제비미납진렬적신방법래제비방벽호강모이급결구미진렬。해제비과정유계산궤공제완성。실험제비출구유불동궤하척촌적일급결구진렬，병재차기출상탐색제비이급결구미진렬적삼충방안，기중，“자상이하”적방안통과대폭광시간화현영시간적공제사제이급결구찰근우제일급결구중，유효제고료량급결구간적련접강도。제비실험적동시，분석료폭광시간、현영시간등삼수대진렬제비적영향。격광직사제비미납진렬적방법구유고효솔、저성본적우점。
Inspired by gecko attachment system, a new method was proposed to fabricate hierarchical bio-mimetic gecko hair arrays by adopting laser direct writing. The fabrication process was controlled on computer. Single-layer pillars of different radial dimensions and axial dimension were fabricated. Based on the laser direct writing, three fabricating schemes of hierarchical structure were developed. Among them,top-down method made the second level structure buried in the structure of the first level by the regulation and control of the exposure time and development time, which effectively improve the connection strength between two arrays. Relationships of exposure depth and exposure time, development depth and development time were also established. This method of fabricating bio-mimetic ecko hair arrays has advantages of low cost and quantity production.