CAJ | 학술논문

研究了真空退火对 TbCo薄膜结构和磁性能的影响.结果表明:薄膜从溅射态的非晶薄膜转化为退火态的微晶薄膜,并以( 100)面择优取向,其 c轴平行于基片.在真空退火不改变 TbCo薄膜的成分的条件下,发现 TbCo薄膜从溅射态的垂直磁化膜转化为退火态的面内膜.
연구료진공퇴화대 TbCo박막결구화자성능적영향.결과표명:박막종천사태적비정박막전화위퇴화태적미정박막,병이( 100)면택우취향,기 c축평행우기편.재진공퇴화불개변 TbCo박막적성분적조건하,발현 TbCo박막종천사태적수직자화막전화위퇴화태적면내막.
The magnetic properties and structures of sputtered and annealed TbCo thin films have been studied. The results show that the film will be changed from the amorphous to the polycrystalline, and oriented with (100) plane. The contents of Tb and Co for the film are not almost changed after vacuum annealing, and a change of the easy axis of the film from out-of-plane to in-plane is found.