CAJ | 학술논문

在水冷反应室式MWPCVD装置中以CH4和H2为反应气体进行了金刚石膜的沉积实验，研究了反应气体的压强对金刚石膜中非金刚石碳相含量的影响。实验发现，当微波输入功率较小时，随着反应气压的上升，沉积膜中非金刚石相碳的含量单调下降；当微波输入功率较大时，沉积膜中非金刚石相碳的含量先随着反应气压的上升而降低，后又随着反应气压的上升而稍稍增加。
재수랭반응실식MWPCVD장치중이CH4화H2위반응기체진행료금강석막적침적실험，연구료반응기체적압강대금강석막중비금강석탄상함량적영향。실험발현，당미파수입공솔교소시，수착반응기압적상승，침적막중비금강석상탄적함량단조하강；당미파수입공솔교대시，침적막중비금강석상탄적함량선수착반응기압적상승이강저，후우수착반응기압적상승이초초증가。
Influence of gas pressure on the content of non-diamond phase carbon in diamond films, grown in CH4/H2 gas mixture by microwave plasma chemical vapor deposition (MWPCVD),was studied.We found that microwave input power and gas pressure may affect the content of the non-diamond phase carbon.At low microwave input power,the content monotonously decreases with the increase of gas pressure,whereas at higher microwave input power,as the gas pressure increases,the content first decreases and then slowly increases.