CAJ | 학술논문

以Al_2O_3和AlN为原料, 在氮气气氛下通过高温固相反应工艺合成氮氧化铝(AlON)粉体, 借助XRD分析系统研究了反应温度、保温时间及原料配比等工艺参数对反应产物相组成的影响并探讨了反应机理. 研究结果表明:该反应主要受热力学控制, 动力学因素也具有重要作用, 反应温度和保温时间对AlON粉体的合成均具有重要影响. 在相对较低的反应温度下, 通过AlN固溶进入Al_2O_3晶格形成富氧(O-rich)的AlON相;在相对较高的反应温度下, 产物中少量残余的AlN通过进一步扩散固溶进入O-rich-AlON晶格形成富氮(N-rich)的AlON相(N-rich-AlON);在1950℃时, 合成单相的AlON粉体.
이Al_2O_3화AlN위원료, 재담기기분하통과고온고상반응공예합성담양화려(AlON)분체, 차조XRD분석계통연구료반응온도、보온시간급원료배비등공예삼수대반응산물상조성적영향병탐토료반응궤리. 연구결과표명:해반응주요수열역학공제, 동역학인소야구유중요작용, 반응온도화보온시간대AlON분체적합성균구유중요영향. 재상대교저적반응온도하, 통과AlN고용진입Al_2O_3정격형성부양(O-rich)적AlON상;재상대교고적반응온도하, 산물중소량잔여적AlN통과진일보확산고용진입O-rich-AlON정격형성부담(N-rich)적AlON상(N-rich-AlON);재1950℃시, 합성단상적AlON분체.
Aluminum oxynitride (AlON) powders were prepared by solid-state reaction processing with α-Al_2O_3 and AlN as starting materials in nitrogen atmosphere. The effects of reactive temperature, holding time, and Al_2O_3/AlN ratio on the resultant phase compositions were investigated systematically by XRD. In addition, the reactive mechanism was tentatively explored. The experimental results indicate that the solid-state reaction for AlON is mostly controlled by thermodynamics and the dynamic factors are also important to the reaction. The reaction can not be thoroughly processed neither only by prolonging holding time at lower reactive temperature nor only by increasing reactive temperature in a shorter holding time. Both reactive temperature and holding time are crucial to the reactive progress. By diffusing AlN into Al_2O_3 lattice, O-riched AlON formations begin between 1600℃ and 1650℃, and finish at about 1750℃. Above 1800℃, O-riched AlON converts into N-riched AlON by further diffusing remnant AlN into Al_2O_3 lattice. Pure AlON is prepared by the solid-state reaction of Al_2O_3 and AlN at 1950℃ in nitrogen atmosphere for 4h.