CAJ | 학술논문

基于化学水浴法,采用氯化镉、氯化铵、氨水和硫脲溶液体系,通过二步法在导电玻璃上制备了CdS薄膜。系统地研究了二步法生长的膜厚比对CdS薄膜厚度、形貌、结构和光学性能的影响。结果表明,制得CdS薄膜为立方闪锌矿结构,随着85℃与75℃生长时间比的优化,表面粗糙度减少,表面结构致密,结晶性能显著提高,可见光波段透过率明显提高。
기우화학수욕법,채용록화력、록화안、안수화류뇨용액체계,통과이보법재도전파리상제비료CdS박막。계통지연구료이보법생장적막후비대CdS박막후도、형모、결구화광학성능적영향。결과표명,제득CdS박막위립방섬자광결구,수착85℃여75℃생장시간비적우화,표면조조도감소,표면결구치밀,결정성능현저제고,가견광파단투과솔명현제고。
Prepared with CdCl2,NH4Cl,NH3OH,CH4N2S through chemical bath deposition（CBD）,the multilayer of CdS films were fabricated by two steps on ITO glass which was systemically investigated for the effect upon film thickness,morphology,crystalloid structure and optical property due to proportion of CdS film with different parameter.Found that structure of two-step CdS film reflects cubic phase.With the optimized proportion of deposition process applied at 85℃ and 75℃,high uniformity compact structure and low surface roughness film was formed,improved characteristic of crystallization and high translucent property at high waveband was achieved.