CAJ | 학술논문

基于Cu的随动强化模型,用二维有限元分析方法,模拟分析了不同互连宽度对Cu互连热应力分布的影响.研究发现,当互连尺寸减小到一定宽度后,静水应力先减小,后略有增加;随线宽的减小,等效塑性应变的最大值逐渐减小,塑性应变最大值的位置由Cu互连上界面处转向Cu互连上界面边角处,而发生等效塑性应变的区域先减小后增加.讨论了在不同Cu互连结构条件下,应力状态和塑性应变对Cu互连可靠性的影响.
기우Cu적수동강화모형,용이유유한원분석방법,모의분석료불동호련관도대Cu호련열응력분포적영향.연구발현,당호련척촌감소도일정관도후,정수응력선감소,후략유증가;수선관적감소,등효소성응변적최대치축점감소,소성응변최대치적위치유Cu호련상계면처전향Cu호련상계면변각처,이발생등효소성응변적구역선감소후증가.토론료재불동Cu호련결구조건하,응력상태화소성응변대Cu호련가고성적영향.
2-dimensional finite element analysis was used to analyze effect of different line widths on stress distribution with elastic-plastic model. It was found that, when the line geometry decreased to a certain width, hydrostatic stress firstly decreased and then increased a little. With decreasing line width, the maximum equivalent plastic strain gradually decreased and the location was turned from the upper interface to the corner of the upper interface in copper interconnects, while the area where equivalent plastic strain occured decreased and then increased. Effects of stress state and plastic strain on reliability of Cu interconnects in different Cu interconnect structures were discussed.