光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2010年
1期
197-204
,共8页
王永泉%陈花玲%彭倍%朱子才
王永泉%陳花玲%彭倍%硃子纔
왕영천%진화령%팽배%주자재
微机电系统(MEMS)%系统级仿真%节点分析法%VHDL-AMS%等效电路
微機電繫統(MEMS)%繫統級倣真%節點分析法%VHDL-AMS%等效電路
미궤전계통(MEMS)%계통급방진%절점분석법%VHDL-AMS%등효전로
Microelectromechanical System(MEMS)%system-level simulation%nodal analysis method%VHDL-AMS%equivalent circuit
为实现MEMS产品的快速设计和性能验证,在借鉴其结构化设计思想即节点分析法的基础上,提出了一种与常规信号流类比不同,适于集成微机电系统快速仿真的等效电路建模思路和方法.首先,对系统及MEMS器件进行功能及结构分解;然后,分别对各基本单元进行节点化建模,并在一定的机电类比规则下将其转换为等效电网络(元件);最后,根据节点变量约束关系,将这些等效网络(元件)逐层重构为器件级和系统级等效电路.结合一类典型MEMS集成系统--梳齿式静电反馈微加速度计的分析实例,对上述方法进行了具体介绍和验证.利用OrCAD等电路仿真器分析、测试了所建立的体现多能域耦合关系的微系统数字化分析原型,结果显示,相对于VHDL-AMS描述法,该模型具有单一域内的更加直观的模型形式和快捷的仿真速度,表明本文提出的方法在复杂MEMS集成系统的分析设计中具有一定的应用价值.
為實現MEMS產品的快速設計和性能驗證,在藉鑒其結構化設計思想即節點分析法的基礎上,提齣瞭一種與常規信號流類比不同,適于集成微機電繫統快速倣真的等效電路建模思路和方法.首先,對繫統及MEMS器件進行功能及結構分解;然後,分彆對各基本單元進行節點化建模,併在一定的機電類比規則下將其轉換為等效電網絡(元件);最後,根據節點變量約束關繫,將這些等效網絡(元件)逐層重構為器件級和繫統級等效電路.結閤一類典型MEMS集成繫統--梳齒式靜電反饋微加速度計的分析實例,對上述方法進行瞭具體介紹和驗證.利用OrCAD等電路倣真器分析、測試瞭所建立的體現多能域耦閤關繫的微繫統數字化分析原型,結果顯示,相對于VHDL-AMS描述法,該模型具有單一域內的更加直觀的模型形式和快捷的倣真速度,錶明本文提齣的方法在複雜MEMS集成繫統的分析設計中具有一定的應用價值.
위실현MEMS산품적쾌속설계화성능험증,재차감기결구화설계사상즉절점분석법적기출상,제출료일충여상규신호류류비불동,괄우집성미궤전계통쾌속방진적등효전로건모사로화방법.수선,대계통급MEMS기건진행공능급결구분해;연후,분별대각기본단원진행절점화건모,병재일정적궤전류비규칙하장기전환위등효전망락(원건);최후,근거절점변량약속관계,장저사등효망락(원건)축층중구위기건급화계통급등효전로.결합일류전형MEMS집성계통--소치식정전반궤미가속도계적분석실례,대상술방법진행료구체개소화험증.이용OrCAD등전로방진기분석、측시료소건립적체현다능역우합관계적미계통수자화분석원형,결과현시,상대우VHDL-AMS묘술법,해모형구유단일역내적경가직관적모형형식화쾌첩적방진속도,표명본문제출적방법재복잡MEMS집성계통적분석설계중구유일정적응용개치.
In order to achieve a rapid design and verify the performance of MEMS products, a new approach suited to establishing equivalent electrical representations of an integrated MEMS but different from the conventional signal-flow principle is proposed in this paper. Based on the structured design methodology of the MEMS,i.e., nodal analysis method, this approach starts from the functional decomposition of the system and MEMS device. Then, the nodal models of these decomposed elements (emphases laid on those transductional ones) are created and transformed as equivalent networks or components by rule of a certain electrical analogy, F-V analogy. Finally, according to the constraint relations for node variables (General Kirchhoff's law), the equivalent networks (components) are hierarchically reconstructed as device-level models and system-level equivalent circuits. Aiming at the analysis and design of a comb-shaped electrostatic feedback micro-accelerometer, the approach is specifically illustrated and validated. The achieved "computational prototype" of such a mixed-domain system can be expediently implemented by OrCAD. Moreover, compared with VHDL-AMS models, it provides that proposed model has more explicit physical conception and more less computation time. It indicates that the approach has its application value in analysis and design of complex integrated MEMSs.
