CAJ | 학술논문

采用单相的ITO复合粉末经放电等离子烧结法(SPS)快速制备了ITO靶材.研究了SPS的主要工艺参数对ITO靶材致密化的影响.结果表明:靶材的相对密度随着烧结温度的升高而增大,在1000 ℃时达到最大值;在1000 ℃下烧结,延长保温时间使相对密度降低;在较低的温度下烧结时,延长保温时间有利于提高靶材的致密度;相对密度随着烧结压力的增加而增大;升温速率过快不利于靶材的致密化.对烧结试样的相组成和化学成分研究表明:不同温度下制备的ITO靶材均有少量的SnO_2相析出,并有不同程度的失氧,铟锡的质量分数略大于ITO原粉中铟锡的质量分数.
채용단상적ITO복합분말경방전등리자소결법(SPS)쾌속제비료ITO파재.연구료SPS적주요공예삼수대ITO파재치밀화적영향.결과표명:파재적상대밀도수착소결온도적승고이증대,재1000 ℃시체도최대치;재1000 ℃하소결,연장보온시간사상대밀도강저;재교저적온도하소결시,연장보온시간유리우제고파재적치밀도;상대밀도수착소결압력적증가이증대;승온속솔과쾌불리우파재적치밀화.대소결시양적상조성화화학성분연구표명:불동온도하제비적ITO파재균유소량적SnO_2상석출,병유불동정도적실양,인석적질량분수략대우ITO원분중인석적질량분수.
ITO targets were fast prepared by SPS from single-phase ITO powder. The densification of the ITO targets as a function of the SPS process parameters was researched systematically. The results indicated that: the relative density of samples increased with the temperature increasing and reached the maximum value when sintered at 1000 ℃ and decreased with long holding time at the same temperature. When sintering at relatively lower temperature, increasing holding time was favorable to increase the density of ITO targets. The relative density of ITO targets increased with the pressure increasing. Too fast heating rate was unfavorable to increase the densification of targets. The analysis of phase composition and chemical constitution indicated that: little SnO_2 precipitated and oxygen loss took place in different degree when sintered at different temperature. In/Sn element ratio of ITO targets was slightly larger than that of the ITO powder.