CAJ | 학술논문

基于传统接触式测长仪器存在不足,通过对长度干涉仪测量原理方法的分析研究,提出采用移相干涉技术进行瞄准定位的方法,并应用在活塞外径测量系统中.通过实验验证:采用双移相干涉测头结构的活塞外径测量系统,对活塞表面瞄准定位的重复性较好,活塞外径系统测量不确定度达到0.1μm,移相干涉在高精度基准活塞外径测量中成功应用,具有较好的推广价值.
기우전통접촉식측장의기존재불족,통과대장도간섭의측량원리방법적분석연구,제출채용이상간섭기술진행묘준정위적방법,병응용재활새외경측량계통중.통과실험험증:채용쌍이상간섭측두결구적활새외경측량계통,대활새표면묘준정위적중복성교호,활새외경계통측량불학정도체도0.1μm,이상간섭재고정도기준활새외경측량중성공응용,구유교호적추엄개치.
Considering the shortcomings of the traditional length measurement instruments, the principle of two-beams interferometer and shift-phase techniques were analyzed and discussed. A new micro positioning measurement method is presented based on the shift-phase interferometer techniques and then it is used to the piston external diameter measurement system. The system combined two shift-phase interferometer has a good measurement repeatability of little phase and measurement uncertainty of 0. 1 μm. The success of external diameter probe research shows a typical application to the length precision measurement As a result, it will promote the extensive application of shift-phase interferometer techniques.