c面白宝石衬底表面形貌对气相传输平衡法制备的γ-LiAlO2层质量的影响
c면백보석츤저표면형모대기상전수평형법제비적γ-LiAlO2층질량적영향
Effect of Surface Morphology of c-plane Sapphire Substrate on Quality of γ-LiAlO2 Layer Fabricated by Vapor Transport Equilibration Technique
  • 万方数据
    人工晶体学报 인공정체학보

    2005年 5期 833-837 ,共5页

    彭观良%李抒智%庄漪%邹军%王银珍%刘世良%周国清%周圣明%徐军%干福熹

    팽관량%리서지%장의%추군%왕은진%류세량%주국청%주골명%서군%간복희

    白宝石%γ-LiAlO2%气相传输平衡%GaN%衬底 白寶石%γ-LiAlO2%氣相傳輸平衡%GaN%襯底
    백보석%γ-LiAlO2%기상전수평형%GaN%츤저
    sapphire%γ-LiAlO2%vapor transport equilibration (VTE)%GaN%substrate
    采用气相传输平衡(VTE)技术,在(0001)面白宝石衬底表面上成功地制备出单相γ-LiAlO2层.研究了白宝石衬底表面形貌对γ-LiAlO2层质量的影响,发现白宝石衬底的表面粗糙度和退火处理是两个影响γ-LiAlO2层质量的重要因素.要制备高质量的γ-LiAlO2层,适度的表面粗糙度是恰当的.对白宝石衬底进行退火处理,γ-LiAlO2层的择优取向变差.并对其中可能的机理进行了探讨.
    채용기상전수평형(VTE)기술,재(0001)면백보석츤저표면상성공지제비출단상γ-LiAlO2층.연구료백보석츤저표면형모대γ-LiAlO2층질량적영향,발현백보석츤저적표면조조도화퇴화처리시량개영향γ-LiAlO2층질량적중요인소.요제비고질량적γ-LiAlO2층,괄도적표면조조도시흡당적.대백보석츤저진행퇴화처리,γ-LiAlO2층적택우취향변차.병대기중가능적궤리진행료탐토.
    A single-phase γ-LiAlO2 layer was successfully fabricated on (0001) sapphire by vapor transport equilibration (VTE) technique. The effects of surface morphology of c-plane sapphire substrate on the quality of γ-LiAlO2 layer were investigated. We have found and verified that the surface roughness and annealing treatment of sapphire are two essential factors to affect γ-LiAlO2 layer quality on the sapphire substrate. To grow high-quality γ-LiAlO2 layer,a moderate surface roughness of sapphire substrate is suitable. The annealing treatment of sapphire substrate deteriorates the oriented growth of the γ-LiAlO2 layer on the sapphire. And the possible mechanism involved was discussed.
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