CAJ | 학술논문

工业上的某些场合要求压力传感器能够在高温、高辐射以及恶劣的环境下正常工作。金刚石的某些特殊性质(如化学上的惰性、高的杨氏模量)以及极大的压阻效应使其成为制作压阻型压力传感器的极佳材料。对利用多晶金刚石薄膜制造的新型高温、高灵敏度压阻型金刚石微压力传感器的原理、结构及其制造技术作了详细介绍。这种传感器适用于勘探、航空航天以及汽车工业。此外，还阐述了金刚石微压力传感器的研究现状，并进一步指出目前存在的问题。
공업상적모사장합요구압력전감기능구재고온、고복사이급악렬적배경하정상공작。금강석적모사특수성질(여화학상적타성、고적양씨모량)이급겁대적압조효응사기성위제작압조형압력전감기적겁가재료。대이용다정금강석박막제조적신형고온、고령민도압조형금강석미압력전감기적원리、결구급기제조기술작료상세개소。저충전감기괄용우감탐、항공항천이급기차공업。차외，환천술료금강석미압력전감기적연구현상，병진일보지출목전존재적문제。
Some industrial applications require the pressure sensors thatare able to operate in high temperature, high radiation and harsh environments. Many properties of diamond (e. g. its chemical inertness and high Young's modulus)and high piezoresis tance make it an excellent material for piezoresistive pressure sensors. A new kind of high-temperature, high sensitivity piezo-resistance diamond pressure microsensor (including its principle, configuration and fabrication tec hnology)was discussed. Thesen sors are suitable for exploration aerospace and automotive applications. The current research status and the related problems were introduced too.