CAJ | 학술논문

设计、制造和测试了一种实现16×16 MEMS光开关的高反射率、大角度静电扭转制动型微镜阵列.该阵列的微镜可进行90扭转并保持稳定的扭转状态以对入射光进行导向.针对微镜的扭转驱动特性,提出了相应的机电模型.通过单片集成光纤槽,实现了光纤.微镜.光纤的无源对准.测试结果表明,微镜反射率为93.1%～96.3%,最低插入损耗为2.1dB,另外,在经过15min的5～90Hz,3mm振幅的振动测试后,光开关的插入损耗的改变值仅为±0.01dB.
설계、제조화측시료일충실현16×16 MEMS광개관적고반사솔、대각도정전뉴전제동형미경진렬.해진렬적미경가진행90뉴전병보지은정적뉴전상태이대입사광진행도향.침대미경적뉴전구동특성,제출료상응적궤전모형.통과단편집성광섬조,실현료광섬.미경.광섬적무원대준.측시결과표명,미경반사솔위93.1%～96.3%,최저삽입손모위2.1dB,령외,재경과15min적5～90Hz,3mm진폭적진동측시후,광개관적삽입손모적개변치부위±0.01dB.
This paper reports on the design,fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS (micro-electro-mechanical system) 16×16 optical switches.The mirror in the array can enlarge its rotation an-gles up to 90°and keep a steady state to steer the optical signal.According to the large-rotation behavior,an electro-mechanical model of the mirror is presented.By monolithic integration of fiber grooves and mirrors fabricated by a sur-face and bulk hybrid micromachining process,the coarse passive alignment of fiber-mirror-fiber can be achieved.The re-flectivity of the mirror is measured to be 93.1%～96.3%.The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2.1dB using OptiFocusTM collimating lensed fibers.Moreover,only about ±0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5～90Hz in the vertical vibration amplitude of 3mm.