CAJ | 학술논문

介绍了一种微机械叉指静电驱动折叠悬臂梁谐振器的设计和制作方法.将Rayleigh分析法和有限元分析法结合起来分析调整器件尺寸和材料参数对器件性能的影响.制作了三种不同悬臂梁宽度的微机械横向谐振器件,经实验检测它们的谐振频率分别为64.5,147.2,255.5kHz,与模拟结果符合得很好.该结果显示由于具有很高的杨式模量,利用多晶3C-SiC材料体系制作的谐振器件能够具有更高的谐振频率.
개소료일충미궤계차지정전구동절첩현비량해진기적설계화제작방법.장Rayleigh분석법화유한원분석법결합기래분석조정기건척촌화재료삼수대기건성능적영향.제작료삼충불동현비량관도적미궤계횡향해진기건,경실험검측타문적해진빈솔분별위64.5,147.2,255.5kHz,여모의결과부합득흔호.해결과현시유우구유흔고적양식모량,이용다정3C-SiC재료체계제작적해진기건능구구유경고적해진빈솔.
Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh's method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters.Three micromachined lateral resonant resonators with different beam widths were fabricated.Their resonant frequencies were experimentally measured to be 64.5,147.2,and 255.5kHz,respectively,which are in good agreement with the simulated resonant frequency.It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young's modulus.