CAJ | 학술논문

采取化学染色法对B,Al和P杂质扩散形成的结深进行检测,通过实验不同浓度染色液的腐蚀特性,选择易于控制和重复性好的染色腐蚀液.同时采用扩展电阻法对同一个样品的结深进行测试,以扩展电阻法所得结果为标准,与染色法的测量结果进行对比,根据测试结果与理论分析,对染色法的测试结果进行修正,确定P扩散结深的测试系数.
채취화학염색법대B,Al화P잡질확산형성적결심진행검측,통과실험불동농도염색액적부식특성,선택역우공제화중복성호적염색부식액.동시채용확전전조법대동일개양품적결심진행측시,이확전전조법소득결과위표준,여염색법적측량결과진행대비,근거측시결과여이론분석,대염색법적측시결과진행수정,학정P확산결심적측시계수.
The coloration solution was applied to determined the width of diffused-junction, in order to distinguish the speciality of etching, different concentration coloration were tested to B, Al and P impurity diffused-junction for electing the proper coloration which had good repetitiveness and could be easily controlled. Taking the spreading resistance probe for standard, the same sample were measured, then compared it with the result of coloration solution method. Based on the test results and the theory analysis, the calibrate diffused-junction depth of B, Al and P measured by coloration were modified to elicit the depth coefficient of P diffused-junction.