计量学报
計量學報
계량학보
ACTA METROLOGICA SINICA
2010年
2期
115-118
,共4页
计量学%三维测头%柔性支撑结构%FBG传感系统%测头标定
計量學%三維測頭%柔性支撐結構%FBG傳感繫統%測頭標定
계량학%삼유측두%유성지탱결구%FBG전감계통%측두표정
Metrology%3-D Probe%Flexible suspension%FBG sensor system%Probe calibration
介绍了一种以光纤布拉格光栅为传感元件的三维测头.测头结构核心为3根悬丝和支架组成的柔性支撑系统,传感系统由3根传感FBG和一根匹配FBG光栅组成.测头的关键参数测定结果为结构复位性精度小于20nm,传感系统重复性小于0.2mV,分辨力小于0.1μm,测力小于5mN.
介紹瞭一種以光纖佈拉格光柵為傳感元件的三維測頭.測頭結構覈心為3根懸絲和支架組成的柔性支撐繫統,傳感繫統由3根傳感FBG和一根匹配FBG光柵組成.測頭的關鍵參數測定結果為結構複位性精度小于20nm,傳感繫統重複性小于0.2mV,分辨力小于0.1μm,測力小于5mN.
개소료일충이광섬포랍격광책위전감원건적삼유측두.측두결구핵심위3근현사화지가조성적유성지탱계통,전감계통유3근전감FBG화일근필배FBG광책조성.측두적관건삼수측정결과위결구복위성정도소우20nm,전감계통중복성소우0.2mV,분변력소우0.1μm,측력소우5mN.
A 3-D probe based on Fiber Bragg Grating(FBG) is introduced. The flexible suspension which composed of three molybdenum threads and a plank is the key part of the structure. The sensor system is composed of three sensor FBG and a match FBG. The structure repeatability is less than 20 nm，the sensor system repeatability is 0.2 mV，the highest resolving power is 50 nm，and the probing force is less than 5 mN.
