CAJ | 학술논문

实现各分块镜间的光学共相位拼接是合成孔径光学系统高分辨率成像的保证.对分块镜间的光学共相位误差的电学检测方法进行了理论分析和实验验证.利用电容测微原理对相邻分块镜间的光学共相位误差实现了测量,测量范围200 μm,分辨率5 nm.搭建了分块镜光学共相位误差电学检测实验装置,装置中设置了分块镜位置微调机构以实现相互间的光学共相位拼接;用Fisba移相干涉仪对搭建的实验装置的共相位误差检测及拼接结果进行了实验验证,结果表明了将电容测微法用于共相位误差检测的可行性.该方法不仅测量范围大、灵敏度高;且与光学检测方法相比,未增加光学系统的复杂性.
실현각분괴경간적광학공상위병접시합성공경광학계통고분변솔성상적보증.대분괴경간적광학공상위오차적전학검측방법진행료이론분석화실험험증.이용전용측미원리대상린분괴경간적광학공상위오차실현료측량,측량범위200 μm,분변솔5 nm.탑건료분괴경광학공상위오차전학검측실험장치,장치중설치료분괴경위치미조궤구이실현상호간적광학공상위병접;용Fisba이상간섭의대탑건적실험장치적공상위오차검측급병접결과진행료실험험증,결과표명료장전용측미법용우공상위오차검측적가행성.해방법불부측량범위대、령민도고;차여광학검측방법상비,미증가광학계통적복잡성.
Implementation of optical co-phase among segmented mirrors in synthetical aperture optical system is the guarantee of its imaging with high resolution.In this paper,an electric testing method for co-phasing error among segmented mirrors was analyzed in the theory and proved in experiment.According to the principle of capacitance micrometer method,the co-phasing error between two adjacent segments was measured.With this method,the co-phasing error within 200μm could be tested and the 5 nm co-phasing error could be resolved.An experimental system,to measure the co-phasing error with the electric method,was set up.In this system,some precise components,used to adjust the position of segmented mirror,were built up so that the implementation of the co-phasing could be realized.Using a phase-shift Fisba interferometer,the effects of the co-phase error testing and the piecing together of segrrlented mirror with the built experimental setup were verified experimentally.And the experimental resuIts indicate that the use of capacitance micrometer method in testing the co-phase error is feasible.The testing method has wide measurement range and high sensitivity,but the complexity of the used optical system does not increase when compared with the optical testing method.