CAJ | 학술논문

利用退火热氧化射频磁控溅射金属锌膜的方法在Si(111)衬底上制备了一维ZnO纳米棒,同时用多种测试手段对样品的晶体结构、表面形貌和光学性能进行了研究.XRD,SEM和TEM的测试结果表明,ZnO纳米棒为单晶相六方纤锌矿结构,呈头簪状向外发散生长,直径在30～60nm左右,其长度可达几μm.PL谱测试结果表明:在波长为280nm光的激发下,在372nm处有强的近带边紫外光发射和516nm处的较微弱深能级绿光发射.说明合成的一维ZnO纳米棒的结晶质量和光学性能优良.
이용퇴화열양화사빈자공천사금속자막적방법재Si(111)츤저상제비료일유ZnO납미봉,동시용다충측시수단대양품적정체결구、표면형모화광학성능진행료연구.XRD,SEM화TEM적측시결과표명,ZnO납미봉위단정상륙방섬자광결구,정두잠상향외발산생장,직경재30～60nm좌우,기장도가체궤μm.PL보측시결과표명:재파장위280nm광적격발하,재372nm처유강적근대변자외광발사화516nm처적교미약심능급록광발사.설명합성적일유ZnO납미봉적결정질량화광학성능우량.
One-dimensional ZnO nanorods are synthesized by oxidating thin metal zinc films deposited on Si(111) substrates with radio frequency magnetron sputtering.The crystal structure,surface morphology,and optical properties of nanorods are investigated.X-ray diffraction(XRD) pattern,scanning electron microscopy(SEM),and transmission electron microscopy(TEM) analyses show that the synthesized single-crystal ZnO nanorods develop like hairpins along different radials,with a hexagonal wurtzite structure.The diameters of nanorods range between 30 and 60nm and lengths up to micrometers.Photoluminescence(PL) analysis shows that,under 280nm light excitation,a strong and sharp near band-edge UV light emission band at 372nm and a relatively weak green deep-level light emission band at 516nm are observed from the ZnO nanorods,which indicates excellent crystallization and optical quality of the fabricated ZnO nanorods.