半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2004年
12期
1573-1575
,共3页
王章涛%樊中朝%夏金松%陈少武%余金中
王章濤%樊中朝%夏金鬆%陳少武%餘金中
왕장도%번중조%하금송%진소무%여금중
集成光学%马赫-曾德干涉仪%开关阵列%光开关
集成光學%馬赫-曾德榦涉儀%開關陣列%光開關
집성광학%마혁-증덕간섭의%개관진렬%광개관
integrated optics%silicon-on-insulator%matrix switches%PLC technology
设计和制作了由5个2×2多模干涉马赫-曾德开关元组成的重排无阻塞型SOI 4×4热光开关阵列.阵列的最小和最大附加损耗分别为6.6和10.4dB,阵列的串扰为-12 ~-19.8dB,光开关阵列的开关速度小于30μs,单个开关元的功耗大约为330mW.
設計和製作瞭由5箇2×2多模榦涉馬赫-曾德開關元組成的重排無阻塞型SOI 4×4熱光開關陣列.陣列的最小和最大附加損耗分彆為6.6和10.4dB,陣列的串擾為-12 ~-19.8dB,光開關陣列的開關速度小于30μs,單箇開關元的功耗大約為330mW.
설계화제작료유5개2×2다모간섭마혁-증덕개관원조성적중배무조새형SOI 4×4열광개관진렬.진렬적최소화최대부가손모분별위6.6화10.4dB,진렬적천우위-12 ~-19.8dB,광개관진렬적개관속도소우30μs,단개개관원적공모대약위330mW.
A rearrangeable nonblocking thermo-optic 4×4 switching matrix,which consists of five 2×2 multimode interference-based Mach-Zehnder interferometer(MMI-MZI) switch elements,is designed and fabricated.The minimum and maximum excess loss for the matrix are 6.6 and 10.4dB,respectively.The crosstalk in the matrix is measured to be between -12 and -19.8dB.The switching speed of the matrix is less than 30μs.The power consumption for the single switch element is about 330mW.