CAJ | 학술논문

基于双向平面四杆机构设计出了二维微动工作台,该工作台采用了内外双层柔性铰链支撑结构,利用压电陶瓷驱动,具有结构简单、加工方便等优点.为了验证该工作台能达到预期效果,在Pro/E中建模再导入ANSYS中进行静态分析,分析结果与计算结果吻合较好.同时在ANSYS中对微动工作台施加X和Y向不同力时,得到X和Y向位移及工作台的最大应力,通过比较得到位移与力成正比,应力与位移成正比,与公式一致,最后建立了微动工作台的动态模型,解析计算与有限元模态分析求解固有频率基本一致,说明该微动工作台基本满足要求.
기우쌍향평면사간궤구설계출료이유미동공작태,해공작태채용료내외쌍층유성교련지탱결구,이용압전도자구동,구유결구간단、가공방편등우점.위료험증해공작태능체도예기효과,재Pro/E중건모재도입ANSYS중진행정태분석,분석결과여계산결과문합교호.동시재ANSYS중대미동공작태시가X화Y향불동력시,득도X화Y향위이급공작태적최대응력,통과비교득도위이여력성정비,응력여위이성정비,여공식일치,최후건립료미동공작태적동태모형,해석계산여유한원모태분석구해고유빈솔기본일치,설명해미동공작태기본만족요구.
2-D micro displacement worktable is designed based on two-planar four-bar linkage, which is sustained by internal and external double layer flexure hinge and is actuated by piezoelectricity ceramic actuator(PZT). It has the advantage of simple structure, convenient manfacture. In order to validate that the worktable can achieve the expected effect,it is established a geometrical modal by Pro/E. ANSYS is used to analyze static state and the analytical results are in good agreement with computing results. It is X and Y displacement and the maximum stress when the micro displacement workable is exerted X and Y different force. The results show that the displacement is proportional to the force and the stress is proportional to the displacement by comparing. It is in agreement with formula. At last, a dynamic model of the worktable is built. The inherent frequency of analytical calculation is consistent with finite element modal analysis. It explained that the workable complied with the basic requirements.