半导体技术
半導體技術
반도체기술
SEMICONDUCTOR TECHNOLOGY
2010年
3期
264-268
,共5页
孙莹%杨瑞霞%武一宾%吕晶%王风
孫瑩%楊瑞霞%武一賓%呂晶%王風
손형%양서하%무일빈%려정%왕풍
量子阱红外探测器%光谱特性%阱中能级%非抛物线性
量子阱紅外探測器%光譜特性%阱中能級%非拋物線性
양자정홍외탐측기%광보특성%정중능급%비포물선성
QW infrared photodetector%spectral characteristic%energy level in QW%nonparabolicity
采用MBE法制备了不同结构参数及不同阱中掺杂浓度的GaAs/Al_xGa_(1-x)As量子阱红外探测器外延材料.通过对量子阱红外探测器材料特性和器件特性的实验测试及理论分析,研究了量子阱红外探测器的响应光谱特性,并通过薛定谔方程和泊松方程的求解,对掺杂对量子阱能级的影响做了研究.结果表明,由于应力导致的能带非抛物线性使得阱中能级发生了变化,从而引起吸收峰向高能方向发生了漂移,而阱中进行适度的掺杂没有对量子阱能级造成影响,光致发光谱实验结果与之吻合较好.在光电流谱的实验分析基础之上,分析了量子阱阱宽、Al组分与峰值探测波长λ_p的关系,为量子阱红外探测器的设计优化提供了参考.
採用MBE法製備瞭不同結構參數及不同阱中摻雜濃度的GaAs/Al_xGa_(1-x)As量子阱紅外探測器外延材料.通過對量子阱紅外探測器材料特性和器件特性的實驗測試及理論分析,研究瞭量子阱紅外探測器的響應光譜特性,併通過薛定諤方程和泊鬆方程的求解,對摻雜對量子阱能級的影響做瞭研究.結果錶明,由于應力導緻的能帶非拋物線性使得阱中能級髮生瞭變化,從而引起吸收峰嚮高能方嚮髮生瞭漂移,而阱中進行適度的摻雜沒有對量子阱能級造成影響,光緻髮光譜實驗結果與之吻閤較好.在光電流譜的實驗分析基礎之上,分析瞭量子阱阱寬、Al組分與峰值探測波長λ_p的關繫,為量子阱紅外探測器的設計優化提供瞭參攷.
채용MBE법제비료불동결구삼수급불동정중참잡농도적GaAs/Al_xGa_(1-x)As양자정홍외탐측기외연재료.통과대양자정홍외탐측기재료특성화기건특성적실험측시급이론분석,연구료양자정홍외탐측기적향응광보특성,병통과설정악방정화박송방정적구해,대참잡대양자정능급적영향주료연구.결과표명,유우응력도치적능대비포물선성사득정중능급발생료변화,종이인기흡수봉향고능방향발생료표이,이정중진행괄도적참잡몰유대양자정능급조성영향,광치발광보실험결과여지문합교호.재광전류보적실험분석기출지상,분석료양자정정관、Al조분여봉치탐측파장λ_p적관계,위양자정홍외탐측기적설계우화제공료삼고.
GaAs/Al_x Ga_(1-x) As quantum well infrared photodetector (QWIP) materials with different structure parameters and doping concentrations in well were designed and prepared by MBE. The response spectral characteristic of QWIP was studied by experimental test of material and device characteristics. And the effect of doping on QW energy level was studied by solving Schroedinger equation and Poisson equation. Result shows that the change of QW energy level is the reason for peak absorption shifts to higher energy. And the change of QW energy level is caused by energy band nonparabolicity induced by stress. Moderately doping in well has little effect on QW energy level, and PL result is well corresponded with the theoretic analysis. Basing on the experimental analysis of the photocurrent spectra, the relation between well width, Al content and peak detection wavelengh λ_p was illuminated, which could provide the reference for the future device design and optimization.