CAJ | 학술논문

无源LCD面板及触摸屏制作过程通常采用湿法刻蚀的方法来制作ITO电极图形,在生产过程中要用到光刻胶、刻蚀液、脱膜液等对环境有污染的材料,而对这些生产过程中的污染物要进行环保处理后才能排放。且工艺过程长,加工成本较高,加工后的ITO图形存在明显的缺陷,如ITO电极线条边缘有毛刺等。文章介绍了一种用激光刻蚀的方法来代替传统的湿法刻蚀方法,来加工用于无源LCD面板及触摸屏等平板显示器的ITO电极图形方法,缩短了工艺过程以及节约了成本、提高了产品质量。
무원LCD면판급촉모병제작과정통상채용습법각식적방법래제작ITO전겁도형,재생산과정중요용도광각효、각식액、탈막액등대배경유오염적재료,이대저사생산과정중적오염물요진행배보처리후재능배방。차공예과정장,가공성본교고,가공후적ITO도형존재명현적결함,여ITO전겁선조변연유모자등。문장개소료일충용격광각식적방법래대체전통적습법각식방법,래가공용우무원LCD면판급촉모병등평판현시기적ITO전겁도형방법,축단료공예과정이급절약료성본、제고료산품질량。
Passive LCD panel and touch-screen manufacture process usually adopts wet etching methods to make graphics,ITO electrode used in production process photoresist,etching fluid,take off to the environment such as fluid of a membrane pollution affects materials,and for the production process of pollutants and to conduct environmental protection treatment to emissions.And process long,processing cost is higher,the processed ITO graphics obvious defects,such as ITO electrode lines margin burr,etc.This paper introduces a method of laser etching instead of traditional wet etching methods to processing used in passive LCD panel and touch-screen etc flat-panel display ITO electrode graphic methods of passive,shorten the process and save the cost,improve the product quality.