CAJ | 학술논문

为拓展非晶硅太阳能电池的应用，有必要提高其开路电压。本文讨论氢等离子体处理对P层和非晶硅太阳能电池性能参数的影响。结果表明：用氢等离子体处理P层可以使电池的平均开路电压提高0．0257V，平均填充因子提高0．039，平均能量转换效率提高0．45％，实验中获得的最高开路电压为0．99V。用氢等离子体处理P层可以提高P层的晶相比，使更多的光子被本征层吸收。此外，这种处理工艺与非晶硅太阳能电池的制备工艺相兼容。
위탁전비정규태양능전지적응용，유필요제고기개로전압。본문토론경등리자체처리대P층화비정규태양능전지성능삼수적영향。결과표명：용경등리자체처리P층가이사전지적평균개로전압제고0．0257V，평균전충인자제고0．039，평균능량전환효솔제고0．45％，실험중획득적최고개로전압위0．99V。용경등리자체처리P층가이제고P층적정상비，사경다적광자피본정층흡수。차외，저충처리공예여비정규태양능전지적제비공예상겸용。
It is necessary to improve the open circuit voltage of amorphous silicon solar cells for its applications. In this paper, we discuss the effects of hydrogen plasma treatment on the P layer and the performance of the amorphous silicon solar cells. The result shows that the open circuit voltage increased by 0. 0257 V, the fill factor increased by 0. 039 and the energy conversion efficiency increased by 0.45%. The highest VOC we got was 0.99 V. Treating P layer with hydrogen plasma has been demonstrated to result in materials with improved crystalline volume fraction which was very effective to increase the light absorption of the intrinsic layer. What is more, it could be easily integrated into the amorphous silicon solar cell mass production process.