CAJ | 학술논문

对60kV、70A、2s离子源的四电极引出-加速系统进行了数值模拟。利用数值计算结果对系统进行了优化。在离子流密度为0.24A*cm－2（束中H＋１∶H＋２∶H＋３＝0．7∶0．2∶0．1)和离子源等离子体离子温度为1eV时，由系统栅缝出射的束最大散角小于1o。
대60kV、70A、2s리자원적사전겁인출-가속계통진행료수치모의。이용수치계산결과대계통진행료우화。재리자류밀도위0.24A*cm－2（속중H＋１∶H＋２∶H＋３＝0．7∶0．2∶0．1)화리자원등리자체리자온도위1eV시，유계통책봉출사적속최대산각소우1o。
Numerical simulation has been done on the tetrode extraction-acceleration system for an ion source with 60kV,70A and 2s.The system was optimized according to the calculation results.The maximum divergence angle of the beam is less than 1o when the ion current density is 0.24A*cm-2 (H＋１∶H＋２∶H＋３＝0．7∶0．2∶0．1　in the beam) and the ion temperature of the ion source plasma is 1eV.